Flow Control
GF100C-100333
Brooks Instrument GF100 Series Mass Flow Controller
About this part
GF100C-100333 identifies a Brooks Instrument GF100-series metal-sealed thermal mass flow controller. The published GF100C prefix denotes the standard-performance, non-pressure-transient-insensitive GF100 platform with configurability enabled. Archived unit evidence identifies nitrogen service and a 10,000 sccm full-scale range; the six-digit suffix is not decoded by Brooks’ product-description-code tables, so the installed fitting, valve state, connector, downstream condition, calibration reference, and customer-specific options require the unit label or manufacturer build record
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Base performance model | GF100; defined by current Brooks ordering instructions as the standard-performance, non-pressure-transient-insensitive model |
| Configurability code | The C immediately following GF100 denotes configurability enabled in the published Brooks product-description code. The device’s present gas and range must still be verified from its configuration record or label |
| Application domain | The GF100 Series is intended for semiconductor, MOCVD, thin-film, and other high-purity gas-flow applications |
| Published GF100 flow envelope | 3 sccm to 55 slm N2-equivalent; this is a model-family envelope rather than proof of the configured range of an individual unit |
| Published flow accuracy | For applicable GF100 analog and DeviceNet configurations: ±1% of set point from above 35% through 100% full scale and ±0.35% of full scale from 2% through 35%, based on factory N2 calibration |
| Published repeatability and reproducibility | For applicable GF100 analog and DeviceNet configurations: ±0.15% of set point from 5% through 100% and ±0.015% of full scale from 2% through 5% |
| Published control range | 2% to 100% with a normally closed valve or 3% to 100% with a normally open valve; the valve configuration of GF100C-100333 is not established |
| Published settling time | GF100 normally closed valve: less than 1 second. GF100 normally open valve: less than 1.5 seconds. The installed valve configuration is not established |
| Operating temperature | 10°C to 50°C for the published GF100 platform |
| Maximum operating pressure | 500 psia maximum in the current GF100 family data sheet; system and unit-label limits remain controlling |
| Differential-pressure context | Published GF100 bins are 7–45 psid at 3–860 sccm, 10–45 psid at 861–7,200 sccm, and 15–45 psid at 7,201–55,000 sccm. Gas-specific exceptions and inlet-pressure requirements apply |
| Wetted-path materials | Published GF100-family materials are SEMI F20 HP compliant and include 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45; PCTFE is used with the optional zero-leak-by valve |
| Published GF100 surface finish | 10 microinch Ra in the current GF100 analog/DeviceNet data sheet; the unit build record remains authoritative for an older or customer-specific configuration |
| Available electrical interfaces | Published GF100 configurations include RS-485/analog through a 9-pin D connector and DeviceNet through a 5-pin M12 connector. EtherCAT is offered as a separate GF100 interface series. The interface installed on GF100C-100333 is not established |
| Diagnostic service port | RS-485 through a 2.5 mm service jack is documented across the applicable GF100 analog and DeviceNet models |
| Published power requirements | DeviceNet: 545 mA maximum at 11–25 VDC and 250 mA maximum at 24 VDC. RS-485/analog: 6 W maximum at ±15 VDC ±10% or 24 VDC ±10%. The installed interface must be identified before applying power |
Published Identifier Interpretation
Only the GF100C prefix can be decoded from Brooks’ public ordering instructions; the hyphenated suffix is not part of the published configurable product-description-code sequence.
Configuration Verification Boundary
A configurable GF100 can store a selected gas and range, and Brooks’ MultiFlo workflow can update the device configuration and customer part-number field. Service, substitution, and installation decisions should therefore use the current top label, connector, fitting geometry, and device configuration record rather than deriving options from 100333.
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $417.89 to $417.89. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- GF100C-100333 / MASS FLOW CONTROLLER, 10000SCCM, N2, / BROOKS INSTRUMENTS