Brooks Instrument GF100 Series Mass Flow Controller
About this part
GF100C-881625 is a configured Brooks Instrument GF100 Series metal-sealed thermal mass flow controller used in semiconductor, MOCVD, thin-film, and high-purity gas delivery. Official Brooks GF100 documentation provides the family-level performance, materials, communication, and MultiFlo context; it does not publish a dedicated one-off specification for the customer/configured suffix GF100C-881625. Stored Sonisys auction records identify observed GF100C-881625 units as N2 10 SCCM and 8000 SCCM configurations, so gas, range, fittings, valve state, and communication interface should be verified from the physical unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 10 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Configured GF100 Series metal-sealed thermal mass flow controller or meter
Series family
Brooks GF100 Series; Brooks documentation also covers related GF101, GF120, GF125, GF126, and GF135 family variants
Configured part number
GF100C-881625
Configuration
Configured-unit rule
GF100C-881625 is a configured part identifier; gas, full-scale flow range, communication interface, valve state, fitting package, surface finish, and customer/OEM details must be confirmed from the unit label and full model code
Applications
Application domain
Semiconductor, MOCVD, thin-film, and other high-purity gas flow control applications requiring an all-metal flow path
Flow
GF100 full-scale flow context
Brooks GF100 analog/DeviceNet data sheet lists GF100 full-scale flow range as 3 sccm to 55 slm N2 equivalent; actual configured range must be read from the unit label
Observed stored auction ranges
Auction-title evidence for GF100C-881625 shows N2 10 SCCM listings and 8000 SCCM listings; these are observed configured units, not a universal model-wide range
Gas/range programmability
The GF100C code indicates a MultiFlo-capable GF100 configuration; Brooks MultiFlo documentation supports reprogramming applicable GF1XX devices across supported gases and ranges without removing the device from the gas line
Performance
Flow accuracy
Flow accuracy as +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration
Repeatability and reproducibility
Repeatability and reproducibility as +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Flow settling time
GF100 normally closed valve response time as less than 1 second and normally open valve response time as less than 1.5 seconds
Pressure transient insensitivity
Pressure transient insensitivity is documented as a GF Series feature and as included with GF125 and GF135 models in Brooks documentation; it should not be assumed for a GF100C-881625 unit unless confirmed by its configuration
Ratings
Operating temperature range
10 to 50 C in official GF100 analog/DeviceNet data sheet
Pressure ratings
GF100 maximum operating pressure as 500 psia, proof pressure as 700 psia, design pressure as 800 psia, and burst pressure as 3000 psia
Materials
Wetted path standard
SEMI F20 high-purity compliant wetted-material context for documented GF100-family configurations
Wetted materials
Wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Surface finish context
Brooks model-code and specification material identifies HP and UHP finish options; exact surface finish for GF100C-881625 should be confirmed from the configured code or unit documentation
Mechanical
Valve and meter options
GF100-family documentation includes normally closed, normally open, and meter/no-valve variants depending on configuration
Controls
Communication interfaces
Brooks GF100-family documentation covers Analog 0-5 VDC, RS485, DeviceNet, and EtherCAT communication options; the actual interface depends on the configured unit
Analog and DeviceNet connection context
RS485/Analog via 9-pin D connector and DeviceNet via 5-pin M12 connector for applicable configurations
Display and diagnostics
Diagnostics
Official GF100 documentation identifies status lights, alarms, integrated display options, and an RS485 diagnostic/service port depending on configuration
