Brooks Instrument GF100CXXC N2 30,000 SCCM Metal-Sealed Mass Flow Controller
About this part
The photographed Brooks unit associated with the record identifier GF100CVVC-SH48030L is labeled GF100CXXC-SH48030L-VXVOSX-XXXXAX-000, Brooks P/N GF100C-902991. It is a GF100-series metal-sealed thermal mass flow controller configured for N2 at 30,000 sccm, with an SH48 MultiFlo bin, normally closed valve, 1/4-inch VCR male fittings, vacuum downstream condition, and an SX 9-pin STEC-pinout interface. GF100CVVC-SH48030L does not appear on the manufacturer label and is a marketplace transcription rather than an official Brooks model or part number
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Manufacturer model number
GF100CXXC
Brooks part number
GF100C-902991
Full product description code
GF100CXXC-SH48030L-VXVOSX-XXXXAX-000
Platform
GF100 standard-performance, non-PTI metal-sealed thermal mass flow controller
Flow
Configured gas
N2
Full-scale flow
30,000 sccm (30 slm)
MultiFlo bin
SH48; Brooks defines this bin as 15,001-30,000 sccm N2-equivalent at a 0°C reference
Reference conditions
0°C and 760 Torr, as stated on the photographed calibration label
Controls
Configurability
MultiFlo capable
Valve configuration
Normally closed
Downstream condition
Vacuum
Communication and connector
SX configuration: 9-pin D connector with STEC pin-out and VTP; an analog/RS-485-family configuration, not DeviceNet or EtherCAT
Diagnostic interface
RS-485 diagnostic/service port via 2.5 mm jack for the applicable analog/RS-485 GF100 platform
Auto shut-off
Enabled
Auto zero
Not included
Customer special request
None identified; code XXXX
Mechanical
Process fitting
VX configuration: 1-1/2-inch body width, 124 mm length, 1/4-inch VCR male
Sensor orientation code
O; Brooks default sensor orientation
Performance
Calibration-label accuracy
1% of setpoint for the labeled N2 calibration
Current GF100 accuracy context
±1% of setpoint above 35-100% full scale and ±0.35% of full scale over 2-35%, based on factory N2 calibration
Response
Photographed unit label states 1000.00 ms; the current GF100 family data sheet specifies less than 1 second settling for a normally closed valve
Overshoot
2% of full scale on the photographed calibration label
Control range
2-100% full scale for a normally closed GF100 valve
Repeatability and reproducibility
Current GF100 family specification: ±0.15% of setpoint from 5-100% and ±0.015% of full scale from 2-5%
Ratings
Operating temperature
10-50°C for the applicable GF100 platform
Differential pressure range
15-45 psid for the applicable 7,201-55,000 sccm flow range
Maximum operating pressure
500 psia maximum for the applicable GF100 platform
Pressure ratings
700 psia proof, 800 psia design, and 3,000 psia burst pressure for the applicable GF100 platform
External leak integrity
1 × 10^-10 atm·cc/s helium at family level
Materials
Surface finish
10 microinch Ra for the GF100 package code
Wetted-path context
SEMI F20 HP-compliant all-metal high-purity flow path; the current family table lists 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45, with PCTFE limited to the optional zero-leak valve. The installed zero-leak option is not established for this unit
Electrical
Power requirement
Applicable analog/RS-485 family rating: 6 W maximum at ±15 Vdc (±10%) or +24 Vdc (±10%)
Identifier reconciliation
The manufacturer label resolves a material transcription error in the inherited identity.
Archived record identifierGF100CVVC-SH48030L
Manufacturer-labeled modelGF100CXXC
Manufacturer-labeled Brooks P/NGF100C-902991
Manufacturer-labeled full codeGF100CXXC-SH48030L-VXVOSX-XXXXAX-000
DispositionGF100CVVC-SH48030L should remain a search or provenance term only; it is not supported as an official Brooks identifier for the photographed unit.
Manufacturer model-code decoding
The complete photographed product description code permits configuration-level decoding against the current Brooks GF100 manual.
Code segment
Manufacturer-defined meaning
GF100
Standard-performance, non-PTI GF100 platform; 10 microinch Ra package context
C
MultiFlo capable
XX
No specialty application
C
Normally closed valve
SH48 030L
SH48 MultiFlo bin; 15,001-30,000 sccm N2-equivalent, with this unit labeled at 30,000 sccm N2
VX
1-1/2-inch body width, 124 mm, 1/4-inch VCR male
V
Vacuum downstream condition
O
Default sensor orientation
SX
9-pin D with STEC pin-out and VTP
XXXX
No customer special-request number identified
A
Auto shut-off included
X
Auto zero not included
000
0°C reference calibration
Photographed calibration-label results
The certificate label is dated March 20, 2021 and identifies N2 test pressure of 35 psig, a 1000.00 ms response setting, 2% full-scale overshoot, and calibration-gas accuracy of 1% of setpoint.
