Flow Control
GF100C-906286
Brooks Instrument GF100 Series Metal-Sealed Thermal Mass Flow Controller
About this part
GF100C-906286 identifies an observed Brooks Instrument GF100 Series thermal mass flow controller for high-purity gas service. The GF100 prefix designates the standard-performance, non-pressure-transient-insensitive platform, while the C code identifies a MultiFlo-capable configuration. The six-digit suffix is not a complete Brooks Product Description Code; the unit label or manufacturer configuration record is therefore required to establish its full-scale range, valve, fitting, downstream condition, communications interface, calibration, and other installed options
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Exact identifier | GF100C-906286 |
| Series | GF100 Series |
| Device class | Metal-sealed, high-purity/ultra-high-purity digital thermal mass flow controller for gases |
| Performance model | GF100 denotes the standard-performance, non-pressure-transient-insensitive model within the current Brooks product-description system |
| Configurability code | C denotes MultiFlo capability; standard bins or a specific gas and range may be selected |
| Unresolved configured attributes | Full-scale range, valve state, fitting, downstream condition, connector, electrical requirements, customer-special-request code, auto-shutoff setting, and reference calibration require the complete product-description code or physical label |
| Application domain | Semiconductor etch, thin-film deposition, MOCVD, PECVD, ALD, PVD, epitaxy, and other high-purity gas-flow applications |
| GF100 full-scale envelope | Current manufacturer model-code tables assign GF100 a 3 sccm to 55 slpm N2-equivalent envelope; the full-scale range of GF100C-906286 is not established |
| Standard MultiFlo bins | GF100 supports eleven standard bins, SH40 through SH50, across the model envelope; the installed bin is not established |
| Repeatability and reproducibility | Applicable GF100 family documents list ±0.15% of set point from 5% to 100% and ±0.015% of full scale from 2% to 5% |
| Settling time | GF100 model context is less than 1 second with a normally closed valve and less than 1.5 seconds with a normally open valve; the installed valve configuration is not established |
| Control range | GF100 family context is 2% to 100% with a normally closed valve and 3% to 100% with a normally open valve |
| Pressure transient insensitivity | Not assigned to the GF100 performance model; Brooks assigns PTI to GF125/GF126 configurations |
| Operating temperature | 10°C to 50°C for standard GF100 configurations |
| Maximum operating pressure | 500 psia maximum in the current standard-flow GF100 family tables |
| Differential pressure context | 7-45 psid at 3-860 sccm, 10-45 psid at 861-7200 sccm, and 15-45 psid at 7201-55000 sccm; exact requirements depend on the configured gas and range |
| External leak integrity | 1 × 10^-10 atm·cc/s helium in current GF100 family tables |
| Wetted-path surface finish | The current GF100 model-code definition specifies 10 microinch Ra |
| Wetted materials | Current GF100 family documentation lists SEMI F20 HP-compliant materials including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45; optional zero-leak valves add PCTFE |
| Installed communications interface | Not established. GF100 configurations are offered with analog/RS-485, DeviceNet, or EtherCAT according to the complete connector code |
| Display | Applicable GF100 configurations provide a top-mounted integrated LCD; detailed behavior varies with the communications platform |
Identifier interpretation
Only the GF100C prefix can be decoded from current manufacturer model-code tables. The hyphenated six-digit suffix does not expose the remaining Product Description Code fields.
Interface-dependent performance
Brooks publishes different GF100 accuracy and zero-stability values for its analog/DeviceNet and EtherCAT implementations. These values must remain conditional until the installed connector is identified.
| Manufacturer document context | Flow accuracy based on factory N2 calibration | Zero stability | Connection and service interface |
|---|---|---|---|
| Analog/DeviceNet data sheet, revision 2025-07 | ±1% of set point above 35-100% full scale; ±0.35% of full scale over 2-35% | Less than ±0.5% of full scale per year | Analog/RS-485 through a 9-pin D connector or DeviceNet through a 5-pin M12 connector; RS-485 service port through a 2.5 mm jack |
| EtherCAT data sheet, revision 2024-10 | ±1% of set point above 20-100% full scale; ±0.2% of full scale over 2-20% | No more than ±0.15% of full scale per year | EtherCAT through RJ45 jacks, power through a 5-pin M8 connector, and Micro-USB service port |
Configuration and software service note
MultiFlo capability is established by the C code, but reprogramming changes the device gas page and range and can affect copy-exact processes. Brooks currently describes MultiFlo Configurator as a legacy, unsupported Windows application and recommends the supported Brooks Expert Support Tool for ongoing compatibility. The approved software and FloCom database versions should be preserved where a tool set follows copy-exact controls.
Documentation Downloads
Local PDF copiesPart Photos
5 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $1,121.25 to $1,121.25. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument Mass Flow Controller Gas: N2 PN: GF100C-906286