Flow Control

GF100C-912588

Brooks Instrument GF100-Series Metal-Sealed Mass Flow Controller

About this part

GF100C-912588 is a configured Brooks Instrument GF100-series metal-sealed thermal mass flow controller for gases. The GF100C prefix identifies the GF100 package and a MultiFlo-capable configuration. The observed archived unit is identified as N2 with a 280 sccm full-scale range. Because -912588 is not the complete ordering code published by Brooks, its valve state, fitting, downstream condition, communication interface, customer-special options, auto-zero functions, and reference temperature remain configuration-dependent

Configurations vary. Verify the exact unit before choosing a replacement.

Specifications Documents (4)Photos (0)Listing history

No archived photo available

Key Facts

ManufacturerBrooks Instrument GF100 Series

Part numberGF100C-912588

Product familyGF100 Series

Device typeMass Flow Controller

Configuration statusConfiguration varies

Application classSemiconductor/high-purity gas delivery

CategoryFlow Control

Specifications

Identification

Manufacturer	Brooks Instrument
Product line	GF100 Series
Device technology	Metal-sealed, high-purity/ultra-high-purity thermal mass flow controller for gases

Model code

GF100 package	The manufacturer’s current model-code table defines code 100 as the 3 sccm to 55 slpm N2-equivalent package with a 1-second response class and 10 µin Ra surface-finish class
Configurability code	C denotes a MultiFlo-capable configuration for which a standard bin or a specific gas and range may be selected

Flow

Observed configured gas and range

N2, 280 sccm full scale; observed-unit evidence, not a universal GF100C specification

Performance

Accuracy by communication family	The current analog/DeviceNet data sheet specifies ±1% of set point from 35-100% full scale and ±0.35% of full scale from 2-35%, based on factory N2 calibration. The EtherCAT literature specifies ±1% of set point from 20-100% and ±0.2% of full scale from 2-20%. The installed interface on GF100C-912588 is not established
Repeatability and reproducibility	Current family literature specifies ±0.15% of set point from 5-100% and ±0.015% of full scale from 2-5% for applicable configurations
GF100 settling-time context	Current family literature lists less than 1 second with a normally closed valve and less than 1.5 seconds with a normally open valve. The valve configuration of GF100C-912588 is unresolved

Ratings

Operating temperature	10-50 °C in current GF100 family specifications
Maximum operating pressure	500 psia maximum for the GF100 package in current family specifications

Materials

Wetted-flow-path context

SEMI F20 HP-compliant all-metal flow-path construction is documented for the family. Listed materials include 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45; optional valve construction can add PCTFE

Controls

Communication options

RS-485/analog, DeviceNet, and EtherCAT versions are documented for the GF100 family. The exact connector and protocol fitted to GF100C-912588 require its full order code or physical label

Applications

Application domain

Semiconductor, MOCVD, thin-film deposition, and other high-purity gas-flow-control applications

Identifier interpretation

Only the published GF100C prefix can be decoded from current Brooks model-code documentation.

Identifier element	Manufacturer meaning	Applicability
GF	High-purity/ultra-high-purity digital mass flow controller platform	Established by the exact prefix
100	3 sccm-55 slpm N2-equivalent package; 1-second response class; 10 µin Ra surface-finish class	Established by the exact prefix
C	MultiFlo-capable; standard bins or a specific gas/range may be selected	Established by the exact prefix
-912588	Not decoded in the published Brooks ordering-code tables	Retain as the exact archive/configured identifier; do not infer option positions

Observed range and standard-bin context

The archived configuration is consistent with the upper limit of the GF100 SH43 standard bin, but the exact bin code is not proven without the label or device record.

Observed gasN2

Observed full-scale range280 sccm

Relevant standard-bin contextSH43 covers 93-280 sccm N2 equivalent at the documented 0 °C reference

Unresolved configuration fieldsValve state, fitting, downstream condition, sensor orientation, communication connector, customer-special code, auto-shutoff, auto-zero, and reference temperature

Configuration software service note

Brooks continues to make MultiFlo Configurator available but now treats it as legacy software.

Brooks states that MultiFlo Configurator is no longer supported and recommends the Brooks Expert Support Tool (BEST) when compatibility problems occur.
Certain Windows 11 security updates may prevent the legacy configurator from operating correctly.
Configurator and FloCom database changes can have copy-exact implications; facilities using copy-exact controls should retain their approved version until changes are qualified.