GF101 is a Brooks Instrument GF-series high-flow thermal mass flow controller or meter model used for semiconductor, MOCVD, thin-film, and high-purity gas delivery. Official Brooks GF100/GF120xHT/GF101 documentation identifies GF101/GF121/GF126 devices as 55 to 300 slm mass flow controllers or meters with MultiFlo support and a high-purity metal-sealed flow path. Stored Sonisys auction records include GF101 listing evidence and one observed N2 150,000 SCCM configured unit, so exact gas, range, fittings, valve state, and communication interface should still be verified from the physical unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2 at 150,000 SCCM / 150 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Model
GF101
Device type
High-flow thermal mass flow controller or meter
Series family
Brooks GF100 / GF101 / GF120 / GF121 / GF125 / GF126 metal-sealed mass flow controller and meter family
GF101 role
GF101 is the 55 to 300 slm high-flow package in the GF100/GF101 family
Observed configuration
Observed gas
N2
Observed full-scale flow
150,000 SCCM / 150 SLM
Observed title context
Stored auction evidence includes GF101 MFC listings and one GF101 mass flow controller described as 13-N2, 150000 SCCM
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, surface finish, and customer/OEM suffix details vary by configured model code
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control applications requiring a high-purity all-metal flow path
Performance
GF101 full-scale flow range
GF101/GF121/GF126 specifications list full-scale flow range as 55 slm to 300 slm
Flow accuracy
GF101/GF121/GF126 specifications list +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration
Repeatability and reproducibility
GF101/GF121/GF126 specifications list less than +/-0.15% of set point
Response time
GF101/GF121/GF126 specifications list normally closed valve response time as less than 1 second
Control range
GF101/GF121/GF126 specifications list 5-100% control range for normally closed valve configurations
Pressure
Differential pressure range
GF101/GF121/GF126 specifications list 30-90 psid differential pressure range
Maximum operating pressure
GF101/GF121/GF126 specifications list 75 psig maximum for controller configurations and 150 psig maximum for meter configurations
External leak integrity
GF101/GF121/GF126 specifications list 1 x 10^-10 atm cc/sec helium external leak integrity
Materials
Wetted path standard
GF101/GF121/GF126 specifications list SEMI F20 HP compliant wetted materials
Wetted material context
Documented wetted materials include 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45
Surface finish context
GF101/GF121/GF126 specifications list 10 microinch Ra or 5 microinch Ra surface finish context depending on configuration
Controls
Gas/range programmability
MultiFlo gas and range configurability is documented for supported GF100/GF101-family devices
Communication interfaces
Documentation includes Analog/RS485, DeviceNet, and EtherCAT interface contexts depending on the configured model
Diagnostic/service port
GF101/GF121/GF126 specifications list an RS485 diagnostic/service port via 2.5 mm jack
Electrical
Analog/RS485 power context
GF101/GF121/GF126 specifications list RS485/Analog power consumption as 6 W maximum at +/-15 VDC or +24 VDC, both +/-10%
DeviceNet power context
GF101/GF121/GF126 specifications list DeviceNet power consumption up to 545 mA at +11-25 VDC and 250 mA at 24 VDC under typical operating conditions
Operating environment
Operating temperature
GF101/GF121/GF126 specifications list 10 C to 50 C operating temperature range
