Flow Control

GF120C-107724

Brooks Instrument GF120CXXC Mass Flow Controller

About this part

GF120C-107724 is a configured Brooks Instrument GF120CXXC metal-sealed thermal mass flow controller identifier in the Brooks GF100 / GF120 / GF125 family. Official Brooks GF100/GF120/GF125 documentation covers the metal-sealed platform, communications, MultiFlo support, dimensional configurations, and installation/operation guidance. Sonisys auction history currently includes two active tracked listing records for this exact configured code, with listing evidence identifying manufacturer part number E23001061, 50 SCCM CH3F, DeviceNet, and surface-mount fitting context. Verify gas, range, communication option, fitting package, valve state, and any customer-specific configuration from the physical unit label before reuse

Unit-specific configuration
Observed configuration

Historical listing records identify this part as CH3F at 50 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part numberGF120C-107724
Product familyGF100 Series
Device typeMass Flow Controller
Observed gasCH3F
Observed full-scale range50 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Part identifierGF120C-107724
Device typeMetal-sealed thermal mass flow controller
Observed model contextGF120CXXC appears in exact listing evidence for this configured code
Series familyBrooks GF100 / GF120 / GF125 metal-sealed mass flow family
Applications
Application domainSemiconductor, MOCVD, thin-film, and high-purity process gas flow control
Performance
Family accuracy contextBrooks GF100/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration
Family settling-time contextBrooks GF100/GF125 documentation lists normally closed valve response from 300 ms to less than 700 ms across listed flow bins
Materials
Wetted path standardBrooks GF100/GF125 documentation describes SEMI F20 HP compliant wetted materials
Controls
Communication interfacesAnalog/RS-485, DeviceNet, or EtherCAT depending on configured model and electronics option
Flow
Gas/range programmabilityMultiFlo gas and range programmability is supported on applicable GF-series configurations
Observed configuration
Manufacturer part number contextE23001061 appears in exact listing evidence for GF120C-107724
Reported gas and range50 SCCM CH3F appears in exact listing evidence; verify against the physical unit label
Reported interfaceDeviceNet appears in exact listing evidence; verify against the physical electronics option
Reported fittingSurface mount appears in exact listing evidence; verify against the physical manifold interface
Configuration
Configured-unit ruleGas, full-scale range, communication interface, valve state, fitting package, seal package, and process options vary by configured model code

Documentation Downloads

Local PDF copies

Part Photos

8 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$2,054.75Based on archived listing records
Recorded price range$2,004.25 - $2,105.25Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $2,014.35 to $2,095.15. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument GF120C-107724 Mass Flow Controller MFC Reseller Lot of 2 New
  • Brooks Instrument GF120C-107724 Mass Flow Controller MFC E23001061 Lot of 3 New

Archived listings

Other Part Numbers & Aliases

GF120C-107724Brooks GF120C-107724Brooks Instrument GF120C-107724Brooks Instruments GF120C-107724