GF120C-896279 is a configured Brooks Instrument GF120C metal-sealed thermal mass flow controller observed in Sonisys auction history with N2O 25,000 SCCM and N2 15,000 SCCM listing contexts. Official Brooks GF100 Series documentation places GF120 in the GF high-purity and ultra-high-purity digital mass flow controller family, with GF120 package documentation covering 3 sccm to 55 slm N2-equivalent flow range, 700 msec response context, 5 Ra package/finish context, MultiFlo-capable configurations, and high-purity all-metal gas delivery applications. Exact gas calibration, full-scale range, fitting, communication interface, valve configuration, and OEM/customer-special details must be verified from the physical label and full configured model code
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2O at 25,000 SCCM / 25 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Configured part number
GF120C-896279
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 high-purity and ultra-high-purity digital mass flow controller family
GF120 package context
Official GF100 Series model-code documentation describes GF120 as a 3 sccm to 55 slm N2-equivalent package with 700 msec response context and 5 Ra finish context
Observed configuration
Observed gas/range contexts
Stored auction titles include N2O 25,000 SCCM and N2 15,000 SCCM examples for GF120C-896279
Observed N2O configuration
Two stored listing records describe GF120C-896279 as N2O 25,000 SCCM
Observed N2 configuration
One stored listing record describes GF120C-896279 as N2 15,000 SCCM with 0190-70700-05 context
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve state, fitting package, surface finish, and customer/OEM suffix details vary by configured model code
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity gas flow control applications requiring a high-purity all-metal flow path
Performance
GF120 standard flow range context
Official GF100 Series model-code documentation lists GF120 flow range context as 3 sccm to 55 slm N2 equivalent
Flow accuracy context
Official GF100/GF120/GF125 specifications list +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration
Repeatability and reproducibility
Official GF100/GF120/GF125 specifications list +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Response and settling context
Official model-code documentation lists GF120 package response context as 700 msec; normally closed valve settling-time bins are listed from 300 ms to less than 700 ms across documented GF100/GF120/GF125 flow bins
Control range
Official GF100/GF120/GF125 specifications list normally closed valve control range as 2-100% for flow ranges below 30 slm and 5-100% for 30-55 slm flow ranges
Pressure
Differential pressure context
Official GF100/GF120/GF125 specifications list differential pressure ranges by flow bin; the exact value depends on gas and configured full-scale range
Maximum operating pressure
Official GF100/GF120/GF125 specifications list 1500 psig maximum operating pressure for controller configurations and 500 psig for meter configurations
External leak integrity
Official GF100/GF120/GF125 specifications list 1 x 10^-10 atm cc/sec helium external leak integrity
Materials
Wetted path standard
Official GF100/GF120/GF125 specifications list SEMI F20 HP compliant wetted materials
Wetted material context
Documented wetted materials include 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, PCTFE for optional zero leak-by valve configurations, and sapphire/ruby in documented contexts
Controls
Gas/range programmability
MultiFlo gas and range configurability is documented for supported GF100-family devices and allows gas/range changes within supported device limits
Communication interfaces
Brooks documentation provides Analog/RS485, DeviceNet, RS485 L-Protocol, and EtherCAT documentation for the GF100 family; actual interface depends on configuration
Diagnostic/service port
Official GF100/GF120/GF125 specifications document an independent RS485 diagnostic/service port through a 2.5 mm jack
Electrical
Analog/RS485 power context
Official GF100/GF120/GF125 specifications list RS485/Analog power consumption as 6 W maximum at +/-15 VDC or +24 VDC, both +/-10%
DeviceNet power context
Official GF100/GF120/GF125 specifications list DeviceNet power consumption up to 545 mA at +11-25 VDC and 250 mA at 24 VDC under typical operating conditions
Operating environment
Operating temperature
Official GF100/GF120/GF125 data-sheet specifications list 10 C to 50 C operating temperature range
