Brooks Instrument GF120 Series Metal-Sealed Mass Flow Controller
About this part
GF120CXXO is a Brooks Instrument GF120-family metal-sealed thermal mass flow controller model-code prefix observed in exact auction and surplus listing evidence. Official Brooks GF100/GF120/GF125 documentation supports the GF120 all-metal high-purity platform, MultiFlo-capable configuration context, standard application-code context, normally open valve option context, communication options, materials, and installation guidance. GF120CXXO by itself does not encode one fixed gas, full-scale range, fitting, electronics option, calibration, surface-mount package, or customer/OEM build record, so those details should be verified from the complete unit label or Brooks configuration record. Stored Sonisys auction history currently observes a 15000 SCCM SH47 / GF120C-109137 context for this exact code; separate surplus evidence observes AR 300 SCCM. These are observed-unit contexts, not official model-wide specifications
Unit-specific configuration
Observed configuration
Historical listing records identify this part as 15000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120CXXO
Device type
Brooks GF120-family metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Model-code context
Read through official Brooks GF100/GF120/GF125 product-description-code tables, GF120CXXO indicates GF120 package context, C MultiFlo-capable configurability, XX standard special-application context, and O normally open valve context
Configuration
Configured-unit rule
GF120CXXO is not a complete build code; gas, full-scale range, communication interface, fitting package, calibration, seal package, electrical connector, and customer/OEM options require the complete configured code, unit label, or Brooks configuration record
Applications
Application domain
Semiconductor, MOCVD, thin-film, implant, etch, and other high-purity gas flow-control applications requiring an all-metal flow path
Flow
GF120 full-scale flow context
Brooks GF100-family ordering information lists GF120 package context as 3 sccm to 55 slpm N2-equivalent; actual configured range must be read from the unit label or configuration record
Gas/range programmability
The C configurability position indicates MultiFlo-capable context in Brooks GF100/GF120/GF125 product-code tables; supported gas and range selections depend on the configured gas code, SH bin, databases, and unit calibration
Mechanical
Valve context
The O valve-position context indicates normally open valve configuration when the code is interpreted using Brooks GF100/GF120/GF125 product-description-code tables
Performance
Family accuracy context
Brooks GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
GF120 response context
Brooks product-code context lists GF120 package response at 700 ms; actual installed response depends on range, gas, valve package, and configuration
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
GF120 pressure-rating context
Brooks GF100/GF120/GF125 tables list GF120 maximum operating pressure as 100 psia max, proof pressure as 140 psia max, design pressure as 170 psia max, and burst pressure as 500 psia max for documented family configurations
Leak integrity
External leak integrity
Brooks GF100/GF120/GF125 documentation lists external leak integrity of 1 x 10^-10 atm cc/sec helium for documented family configurations
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted-material context
GF120 surface-finish context
Brooks GF100-family ordering information lists GF120 package context with 5 microinch Ra surface finish
Controls
Communication interfaces
Brooks GF100-family documentation covers analog 0-5 VDC, RS485, DeviceNet, RS485 diagnostic/service access, and EtherCAT communication options; the actual GF120CXXO unit interface depends on its configured electronics option
Observed variants
Stored auction gas/range combinations
15000 SCCM SH47 / GF120C-109137 appears in two stored Sonisys auction records for GF120CXXO; use as observed unit context only
External exact listing gas/range context
AR 300 SCCM appears in one exact GF120CXXO surplus listing; use as observed unit context only and verify against the physical label
