GF120X-100877 is a configured Brooks Instrument metal-sealed thermal mass flow controller identifier in the Brooks GF100 / GF120 / GF125 family. Official Brooks GF100/GF120/GF125 documentation covers the metal-sealed platform, GF120 Safe Delivery System context, communication options, MultiFlo support for applicable configurations, dimensional configurations, and installation/operation guidance, but no verified official one-part specification for GF120X-100877 is currently available Sonisys auction history identifies this configured code with 10 SCCM AsH3 wording. Verify gas, full-scale range, controller configuration, valve state, communication option, fitting package, surface finish, and any customer-specific markings from the physical unit label before reuse
Unit-specific configuration
Observed configuration
Historical listing records identify this part as AsH3 at 10 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF120X-100877
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow family
Applications
Application domain
Semiconductor, MOCVD, thin-film, implant, etch, and high-purity process gas flow control
GF120 SDS context
Brooks family documentation describes the GF120 Safe Delivery System option as a low-pressure-drop mass flow controller for sub-atmospheric safe delivery system gases used in implant and etch processes
Performance
Family accuracy context
Brooks GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, and less than 3 seconds for documented GF120XSL/GF120XSD SDS configurations
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials for documented family configurations
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Controls
Communication interfaces
Analog/RS-485, DeviceNet, or EtherCAT depending on configured model and electronics option
Flow
Gas/range programmability
MultiFlo gas and range programmability is supported on applicable GF-series configurations; Brooks model-code documentation also identifies non-configurable SDS gas/range configurations
GF120 SDS flow-range context
Brooks model-code documentation identifies GF120 SL Safe Delivery System configurations for 4-25 sccm N2 equivalent and SD Safe Delivery System configurations for greater than 25 sccm to 1 slpm N2 equivalent
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
Configuration
Configured-unit rule
Gas, full-scale range, communication interface, valve or meter configuration, fitting package, seal package, surface finish, and process options vary by configured model code
Observed configuration
Stored auction gas/range evidence
10 SCCM and AsH3 appear in stored exact-part auction title evidence for this configured identifier
Historical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$1,179.01Based on archived listing records
Recorded price range$1,148.77 - $1,209.24Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,154.82 to $1,203.19. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
Brooks Instrument GF120X-100877 Mass Flow Controller MFC 10 SCCM AsH3 New Spare
