Flow Control
GF120X-912956
Brooks Instrument Gas-Specific Metal-Sealed Thermal Mass Flow Controller
About this part
Brooks Instrument GF120X-912956 is a configured GF100 Series digital thermal mass flow controller built on the GF120 high-performance, non-PTI platform. The X code means configurability is disabled: the device is not MultiFlo-capable and requires a specific gas and range. The archived unit is identified for AsH3 (arsine) service. The shortened identifier does not establish its flow range, special-application subtype, valve, fitting, connector, communications interface, or calibration
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
Specifications
| Manufacturer | Brooks Instrument |
| Product family | GF100 Series; GF120 platform |
| Device type | Metal-sealed high-purity/ultra-high-purity digital thermal mass flow controller for gases |
| Performance model | GF120 — high-performance, non-pressure-transient-insensitive configuration |
| Configurability code | X — configurability disabled; not MultiFlo capable; a specific gas and range are required |
| Wetted flow path | All-metal, corrosion-resistant, SEMI F20 HP-compliant flow path; exact materials and valve components depend on the full configuration |
| Family application context | Semiconductor, MOCVD, and other high-purity gas-flow control applications |
| Installed communications interface | Not established by GF120X-912956; RS-485/analog, DeviceNet, and EtherCAT are configuration-dependent family interfaces |
What Does GF120X-912956 Mean?
The published Brooks product-description-code structure decodes the GF120X prefix. The six-digit suffix is not a substitute for the omitted configuration fields.
| Segment | Field | Interpretation |
|---|---|---|
| GF | Base model code | High-purity/ultra-high-purity digital mass flow controller family. |
| 120 | Performance model | High-performance, non-PTI GF120 platform. |
| X | Configurability | Disabled; not MultiFlo capable, with a specific gas and range required. |
| 912956 | Configured-unit suffix | Not defined in the published Brooks product-description-code table. Retain it verbatim; it does not establish the special application, valve, gas/range, fitting, connector, communications, customer requirement, or calibration options. |
Documentation Downloads
Local PDF copiesPart Photos
3 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerThe typical recorded price range is $299.99 to $299.99. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF Series AsH3 Arsine MFC Mass Flow Controller GF120X-912956