Brooks Instrument GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF125C-100040 is a configured Brooks Instrument GF125/GF100-family metal-sealed thermal mass flow controller for semiconductor, MOCVD, thin-film, and high-purity gas delivery. Official Brooks GF100/GF120/GF125 documentation covers the platform, performance context, materials, communication families, MultiFlo support, and installation guidance, but no verified official one-part specification for GF125C-100040 is currently available Stored Sonisys auction history and surplus listings associate this exact configured identifier with GF125CXXC wording, AMAT 0190-40281-02 context, DeviceNet/surface-mount observations, and HE 10 SLM, AR 5000 SCCM, and N2 7200 SCCM listing contexts; verify gas, full-scale range, valve state, fitting package, communication option, and any AMAT marking from the physical unit label before reuse
Unit-specific configuration
Observed configuration
Historical listing records identify this part as HE at 10 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125C-100040
Device type
Metal-sealed thermal mass flow controller
Series family
Brooks GF100 / GF120 / GF125 metal-sealed mass flow controller and meter family
Observed model context
GF125CXXC appears in exact surplus/listing evidence for this configured code; treat it as observed model wording, not as an exact alias
Observed AMAT context
AMAT 0190-40281-02 appears with GF125C-100040 in exact surplus/listing evidence; verify the marking on the physical unit label before procurement or installation
Applications
Application domain
Semiconductor, MOCVD, thin-film, and high-purity process gas flow control applications requiring an all-metal flow path
Performance
Family accuracy context
Brooks GF100/GF120/GF125 documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35% based on factory N2 calibration for applicable analog and DeviceNet configurations
Family repeatability context
Brooks GF100/GF120/GF125 documentation lists repeatability and reproducibility of +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Family settling-time context
Brooks GF100/GF120/GF125 documentation lists normally closed valve settling-time bins from 300 ms to less than 700 ms across documented flow bins, depending on configuration
Pressure transient insensitivity
Brooks model-code documentation identifies GF125 package/finish code 125 as pressure transient insensitive with a 3 sccm to 55 slpm N2-equivalent flow-range context
Materials
Wetted path standard
Brooks GF100/GF120/GF125 documentation describes SEMI F20 HP compliant wetted materials
Wetted materials context
Brooks GF100/GF120/GF125 documentation lists wetted material context including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero leak-by valve configurations
Leak integrity
External leak integrity
Brooks GF100/GF120/GF125 data-sheet table lists external leak integrity of 1 x 10^-10 atm cc/sec helium
Controls
Communication interfaces
Brooks documentation provides Analog/RS-485, DeviceNet, RS485 L-Protocol, and EtherCAT context for the GF100 family; the actual interface depends on the configured electronics option
Observed connector context
Exact surplus/listing evidence for GF125C-100040 reports DeviceNet primary connector context; treat this as observed unit evidence, not a universal model-wide specification
Flow
Gas/range programmability
MultiFlo gas and range configurability is documented for supported GF100-family devices
Ratings
Operating temperature context
Brooks GF100/GF120/GF125 documentation lists a 10 C to 50 C operating temperature range for documented family configurations
Configuration
Configured-unit rule
Gas, full-scale flow range, valve or meter configuration, fitting package, electrical connector, communication protocol, display, surface finish, seal package, and customer/OEM options vary by full configured model code
Observed configuration
Stored auction gas/range combinations
Stored Sonisys title evidence includes HE 10 SLM, AR 5000 SCCM, and N2 7200 SCCM contexts for this exact configured identifier
Additional surplus observations
Surplus listings for this exact configured identifier report GF125CXXC model wording, AMAT 0190-40281-02 context, DeviceNet, surface-mount/C-seal observations, normally closed valve context, and gas/range configurable wording
