Flow Control

GF125C-103954

Brooks Instrument GF125C Metal-Sealed Mass Flow Controller

About this part

GF125C-103954 is a configured Brooks Instrument GF125C metal-sealed thermal mass flow controller in the GF100/GF120/GF125 family. Official Brooks GF100-series documentation covers GF125 models as high-purity gas MFCs/meters with configurable gas, range, valve, fitting, and communication options. Stored exact-part listing evidence associates this configured code with AMAT 0190-49897 context and 15000 SCCM; one surplus lot also identifies the gas as N2. Treat those as observed configured-unit details, not universal model-wide specifications

Unit-specific configuration
Observed configuration

Historical listing records identify this part as N2 observed in one surplus lot listing; not confirmed by an official Brooks build sheet at 15000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part numberGF125C-103954
Product familyGF100 Series
Device typeMass Flow Controller
Observed gasN2 observed in one surplus lot listing; not confirmed by an official Brooks build sheet
Observed full-scale range15000 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeMetal-sealed high-purity thermal mass flow controller for gases
Series familyBrooks GF100 / GF120 / GF125 Series
Configured model codeGF125C-103954
Configuration
Configured-unit ruleGas, full-scale range, communication interface, valve state, fitting package, surface finish, and process options vary by configured model code and should be confirmed from the unit label or Brooks build record
Applications
Application domainSemiconductor, MOCVD, thin-film, and other high-purity gas flow-control applications
Flow
Official family flow-range contextBrooks GF100-series documentation lists GF100/GF120/GF125 full-scale flow ranges from 3 sccm to 55 slm, depending on model and configuration
Observed configured rangeStored exact-part listing evidence identifies GF125C-103954 as 15000 SCCM; this is observed configured-unit evidence, not an official Brooks build-sheet value
Observed configured gasOne surplus lot listing associates GF125C-103954 / 0190-49897 with N2; confirm gas service on the physical label before reuse
Control rangeOfficial documentation lists 2-100% for normally closed valve configurations and 3-100% for normally open valve configurations
Gas/range programmabilityBrooks MultiFlo gas and range configurability is documented for GF1XX-series devices; availability and programmed gas/range depend on the exact unit configuration
Performance
Flow accuracyOfficial GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35%, based on factory N2 calibration
Repeatability and reproducibilityOfficial GF100/GF120/GF125 documentation lists 5-100% as +/-0.15% of set point and 2-5% as +/-0.015% of full scale
Settling-time contextFor normally closed GF100/GF120/GF125 configurations, official documentation lists 500 ms settling time for the 7201-30000 sccm bin and less than 700 ms for the 30001-55000 sccm bin
Pressure transient insensitivityOfficial GF100-series documentation lists GF125 pressure transient insensitivity as less than 5% of set point for up to a 5 psi/sec upstream pressure spike
Materials
Wetted path standardOfficial GF100/GF120/GF125 documentation lists SEMI F20 HP compliant wetted materials
Wetted materials contextDocumented wetted materials include 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero-leak-by valve configurations
Controls
Communication interfacesBrooks documentation lists RS485/analog and DeviceNet options for GF100/GF120/GF125 models, with EtherCAT covered by separate GF100-series EtherCAT documentation; exact interface is configuration dependent
Diagnostic/service portOfficial GF100/GF120/GF125 documentation lists an independent RS485 diagnostic/service port via 2.5 mm jack
Electrical
Power contextOfficial documentation lists DeviceNet consumption up to 545 mA at +11 to 25 Vdc and RS485/analog power at 6 W maximum using +/-15 Vdc or +24 Vdc, depending on configuration

Documentation Downloads

Local PDF copies

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$287.00Based on archived listing records
Recorded price range$75.00 - $499.00Low to high recorded listing price
Local documents4PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $117.40 to $456.60. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • BROOKS MASS FLOW GF125C-103954 AMAT 0190-49897-01 - 15000SCCM
  • BROOKS MASS FLOW GF125C-103954 AMAT 0190-49897-02 - 15000SCCM

Archived listings

Other Part Numbers & Aliases

GF125C-103954Brooks GF125C-103954Brooks Instrument GF125C-103954