Brooks Instrument GF125 Series Metal-Sealed Mass Flow Controller
About this part
GF125C-105872 is a configured Brooks Instrument GF125/GF100-family metal-sealed thermal mass flow controller for semiconductor and high-purity gas delivery. Stored Sonisys auction records associate this exact configured identifier with GF125CXXC wording, AMAT 0190-49896-02 context, and observed Ar, N2, and C3H6 flow-range listings; gas, full-scale range, valve state, fitting package, communication protocol, and OEM suffix details still need to be verified from the physical unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as Ar / N2 / C3H6 at Ar 7000-10000 SCCM; N2 7200 SCCM; C3H6 2000 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Metal-sealed thermal mass flow controller or meter
Series family
Brooks GF100/GF120/GF125 metal-sealed mass flow controller and meter family
Configured identifier
GF125C-105872
Configuration
Configured-unit rule
Gas, full-scale flow range, valve type, fitting package, electrical connector, communication protocol, display, and OEM/customer suffix options vary by full configured model code
Applications
Application domain
Semiconductor, MOCVD, thin-film, and other gas-flow control applications requiring a high-purity all-metal flow path
Performance
Flow accuracy context
GF100/GF120/GF125 documentation lists +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration
Repeatability and reproducibility
GF100/GF120/GF125 documentation lists +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5%
Settling time context
Normally closed valve settling-time bins are listed from 300 ms to less than 700 ms across documented GF flow bins
Pressure transient insensitivity
GF100-family documentation identifies pressure transient insensitivity as a feature that reduces upstream-pressure crosstalk sensitivity; PTI availability is configuration dependent
Flow
Gas/range programmability
MultiFlo gas and range configurability is documented for supported GF100-family devices
Controls
Communication interfaces
Brooks documentation provides Analog/RS485, DeviceNet, RS485 L-Protocol, and EtherCAT context for the GF100 family; actual interface depends on configuration
Materials
Wetted materials
GF100/GF120/GF125 documentation lists SEMI F20 HP compliant wetted materials including 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45
Leak integrity
External leak integrity
GF100/GF120/GF125 table lists external leak integrity of 1 x 10^-10 atm cc/sec helium
Environmental
Operating temperature
GF100/GF120/GF125 data-sheet table lists 10 C to 50 C operating temperature range
Observed variants
Stored auction gas/range combinations
Stored title evidence includes Ar 10000 SCCM, Ar 7000 SCCM, N2 7200 SCCM, and C3H6 2000 SCCM contexts for this configured identifier
