Brooks GF125C Series Metal-Sealed Thermal Mass Flow Controller
About this part
GF125C-855737 is an exact configured-unit identifier observed in Sonisys auction history for a GF125 mass flow controller in Celerity/Brooks context. Official Brooks GF100/GF120/GF125 family documentation verifies the GF125 as a pressure-transient-insensitive, high-purity, metal-sealed mass flow controller with MultiFlo-capable configurations, but no verified official Brooks PDF or build sheet naming the exact GF125C-855737 identifier is currently available. Exact gas, full-scale range, fitting, communication interface, valve state, and process options must be verified from the physical unit label or configuration record
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125C-855737
Series context
Brooks GF100 / GF120 / GF125 family documentation covers GF125 mass flow controllers and meters; GF125C-855737 is a configured-unit identifier rather than a universal gas/range specification
Device type
High-purity / ultra-high-purity metal-sealed thermal mass flow controller or meter, depending on configured valve option
Configuration
Configured-unit rule
Gas code or MultiFlo bin, full-scale range, communication interface, valve state, fitting package, downstream pressure basis, sensor orientation, display option, and customer-special options vary by the complete configured model code and should not be inferred from the GF125C-855737 suffix alone
GF125 package / finish context
Brooks product-code documentation identifies the 125 package as a pressure-transient-insensitive GF configuration with 3 sccm to 55 slpm N2-equivalent family range, +/-1.0% set-point accuracy context, 300-700 ms response context, and 5 microinch Ra surface-finish context
GF125C configurability context
The C configurability position in Brooks GF100/GF120/GF125 product-code documentation denotes MultiFlo capability where standard bins or a specific gas/range may be selected
Applications
Application domain
Semiconductor, MOCVD, thin-film, and other high-purity gas flow-control applications requiring an all-metal flow path
Performance
Flow accuracy
Family-level GF100/GF120/GF125 analog and DeviceNet documentation lists +/-1% of set point above 35-100% and +/-0.35% full scale over 2-35%, based on factory N2 calibration; exact configured accuracy should be verified for the installed gas/range and interface
Settling time
Family-level GF125 normally closed valve response is documented across flow bins from 300 ms to less than 700 ms; exact behavior depends on configuration and process conditions
Materials
Wetted path standard
Family-level documentation lists SEMI F20 HP compliant wetted materials with 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and optional PCTFE on zero leak-by valve configurations
Controls
Communication interfaces
Brooks GF100/GF120/GF125 family documentation covers analog/RS-485, DeviceNet, and EtherCAT communication variants; the exact interface for GF125C-855737 must be read from the unit label or configuration record
Flow
Gas/range programmability
MultiFlo gas and range configurability is supported on applicable GF125C configurations; the configured gas/range for this exact identifier was not verified from official documentation
Observed variants
Stored auction gas/range combinations
No reliable gas/range combination was extracted from stored auction titles for GF125C-855737
Documents
Documentation status
No official exact GF125C-855737 Brooks PDF, datasheet, calibration sheet, or build sheet is currently available in the Sonisys document archive