Brooks Instrument GF125 Series EtherCAT Metal-Sealed Mass Flow Controller
About this part
GF125CXXC-0015030L-CXVOE0-1181AX-000 is a configured Brooks Instrument GF125-series high-purity metal-sealed thermal mass flow controller identifier observed in Sonisys auction records. Official Brooks GF100/GF120/GF125 product-description-code documentation supports the decoded configuration as a GF125 pressure-transient-insensitive, MultiFlo-capable, standard-application, normally closed controller with SEMI gas code 0015, 030L maximum flow range, CX 92 mm C-seal fitting, vacuum outlet condition, default sensor orientation, E0 EtherCAT communication, customer special requirement 1181, auto shut-off included, auto zero not included, and 0 C reference calibration. No verified official exact-part PDF or build sheet naming the full identifier is currently available, so installed gas compatibility, CSR details, calibration data, and process suitability should still be confirmed from the physical unit label or Brooks build record
Unit-specific configuration
Observed configuration
Historical listing records identify this part as O2 at 30 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
GF125CXXC-0015030L-CXVOE0-1181AX-000
Device type
Configured Brooks Instrument GF125 high-purity metal-sealed thermal mass flow controller; the C valve-code segment indicates a controller with normally closed valve rather than a meter-only build
Series documentation family
Brooks documentation groups GF100, GF101, GF120, GF120XSD, GF120XSL, GF121, GF125, and GF126 under the GF100 metal-sealed mass flow controller and meter documentation set
Configuration
Decoded model code
GF125CXXC-0015030L-CXVOE0-1181AX-000 decodes as GF125 package, C MultiFlo capable, XX standard application, C normally closed valve, 0015 gas code with 030L maximum range, CX fitting, V outlet-to-vacuum condition, O default sensor orientation, E0 EtherCAT connector, CSR 1181, A auto shut-off included, X auto zero not included, and 000 reference temperature
Gas and range code
Brooks product-code instructions define the gas/range segment as a SEMI gas code plus maximum range; SEMI gas code 0015 corresponds to oxygen and 030L indicates a 30 slm maximum range. Confirm the active calibration and process suitability from the unit label or Brooks build record
Configured-unit rule
Customer special requirement 1181, calibration record, installed pressure limits, and material/process compatibility remain configuration-specific and should be confirmed from the full unit label or Brooks build record
Applications
Application domain
Brooks GF100/GF120/GF125 family documentation positions these devices for semiconductor, MOCVD, thin-film, and other high-purity gas flow-control applications requiring an all-metal flow path
Performance
GF125 package context
Brooks model-code documentation identifies GF125 as the pressure-transient-insensitive package with 3 sccm to 55 slpm nitrogen-equivalent flow-range context, +/-1.0% of set point accuracy context, 300 ms to 700 ms response context, and 5 microinch Ra surface-finish context
Flow accuracy
Official GF100/GF120/GF125 family documentation lists accuracy as +/-1% of set point over the upper controlled range and +/-0.35% full scale over the lower controlled range, based on factory nitrogen calibration; exact installed performance remains gas- and configuration-dependent
Response context
For normally closed GF125 configurations, the official family data sheet lists response-time context from 300 ms to less than 700 ms across flow ranges; the 7201 to 30000 sccm range band is listed at 500 ms
Pressure transient behavior
Brooks documentation describes the GF125 package as pressure-transient-insensitive and lists upstream pressure-spike insensitivity context for GF125; verify installed pressure behavior against the physical unit and application
Mechanical
Fitting code
CX in the official Brooks GF100/GF120/GF125 EtherCAT product-description-code table indicates 1-1/8 in body width, 92 mm C-seal fitting
Downstream and sensor codes
V indicates outlet to vacuum, and O indicates the default sensor orientation in the Brooks product-description-code table
Controls
Connector/interface code
E0 in the official Brooks GF100/GF120/GF125 EtherCAT product-description-code table indicates EtherCAT communication
Auto functions
A indicates auto shut-off included, X indicates auto zero not included, and 000 indicates 0 C reference calibration in the official Brooks product-description-code table
Materials
Wetted path standard
Official GF100/GF120/GF125 family documentation describes SEMI F20 HP-compliant wetted materials for the family
Flow
Gas/range programmability
The C configurability segment indicates MultiFlo capability, and Brooks MultiFlo documentation supports gas and range programming for applicable GF1XX devices; use the unit record to confirm the installed active gas table and range
Observed configuration
Stored auction gas/range combination
Stored exact-part auction evidence reports O2 30 SLM wording and LAM 797-250482-070 context on 2 tracked listing records; this is retained as observed listing context only
Live listing observation
A live marketplace listing for the exact identifier shows Brooks brand,, O2 30 SLM seller-note context, LAM 797-250482-070 context, item images, and price context; this evidence is used only for identity, observed configuration, image, and price context
