Flow Control
GF125XSL
Brooks GF125 Series Mass Flow Controller
About this part
GF125XSL is a configured Brooks Instrument GF125 Series metal-sealed thermal mass flow controller identifier in the GF100/GF120/GF125 family. Official Brooks GF100-series data-sheet material describes GF125 as the pressure-transient-insensitive GF-series controller platform for high-purity and ultra-high-purity gas flow control. Sonisys auction history includes GF125XSL-100122 / GF125X-100122 examples and 750 SCCM B2H6/N2 or N2 listing contexts; those are observed configured-unit records, not model-wide gas or range limits
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberGF125XSL
Product familyGF100 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Metal-sealed thermal mass flow controller |
| Series family | Brooks GF100 / GF120 / GF125 Series |
| GF125 family role | Second-generation multi-variable pressure transient insensitive mass flow controller platform |
Flow
| Standard GF full-scale range | 3 sccm to 55 slm nitrogen equivalent for standard GF100/GF120/GF125 configurations |
| Gas/range programmability | MultiFlo gas and range technology is standard on applicable GF125 configurations |
| MultiFlo bin count | GF100/GF120/GF125 documentation lists 11 MultiFlo bins |
Applications
| Application domain | Semiconductor, MOCVD, vacuum thin-film, solar, and high-purity gas flow control |
Performance
| Flow accuracy | +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration |
| Repeatability and reproducibility | +/-0.15% of set point from 5-100% and +/-0.015% full scale from 2-5% |
| Pressure transient insensitivity | GF125 pressure transient insensitive control minimizes flow variation caused by inlet pressure and temperature fluctuations |
| Pressure spike response | GF125 documentation lists less than 5% of set point variation up to a 5 psi/sec upstream pressure spike |
| Settling time | Normally closed valve settling time is listed as 300 ms for 3-860 sccm, 400 ms for 861-7200 sccm, 500 ms for 7201-30000 sccm, and less than 700 ms for 30001-55000 sccm |
| Control range | 2-100% for normally closed valve configurations and 3-100% for normally open valve configurations |
Pressure
| Differential pressure ranges | 3-860 sccm: 7-45 psid; 861-7200 sccm: 10-45 psid; 7201-55000 sccm: 15-45 psid |
| GF125 maximum operating pressure | 500 psia maximum |
| GF125 proof/design/burst pressure | 700 psia proof pressure, 800 psia design pressure, and 3000 psia burst pressure |
Valve
| Valve configurations | Normally closed, normally open, meter/no-valve, standard Hastelloy valve, and optional zero-leak-by configurations depending on model code |
| Normally closed valve shutoff | Standard Hastelloy valve is listed as less than 1% of full scale; optional zero-leak-by valve configurations list lower shutoff values by option |
Materials
| Wetted path standard | SEMI F20 HP compliant wetted materials |
| Wetted materials | 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, KM-45, and PCTFE on optional zero-leak-by valve configurations |
| Surface finish | GF-series documentation identifies high-purity surface-finish options, including 10 microinch Ra and 5 microinch Ra values depending on configuration |
Integrity
| External leak integrity | 1 x 10^-10 atm cc/sec helium |
Environmental
| Operating temperature | 10 C to 50 C |
Controls
| Communication interfaces | Analog/RS-485, DeviceNet, or EtherCAT depending on configuration |
| Diagnostic/service port | RS-485 diagnostic/service port through a 2.5 mm jack |
Configuration
| Configured-unit rule | Gas, range, communication interface, valve state, fitting package, body style, surface-finish option, and process options vary by configured model code and must be verified from the physical unit label |
Observed variants
| Stored auction gas/range combinations | 750 SCCM (3), N2 750 SCCM (1), B2H6/N2 750 SCCM contexts observed in stored and listings |
Documentation Downloads
Local PDF copiesPart Photos
18 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records13Tracked historical listing records
Historical median price$303.80Based on archived listing records
Recorded price range$99.00 - $846.94Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $164.00 to $679.60. Based on 13 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 40722049 BROOKS MFC GF SERIES GF125XSL
- Brooks Instrument Thermal Mass Flow Controller Used GF125XSL 5% B2H6/N2 750SCCM
- 6412 BROOKS MFC MASS FLOW CONTROLLER GF125XSL
- BROOKS GF SERIES Thermal Mass Flow GF125XSL
- BROOKS USED GF125XSL-100122 THERMAL MASS FLOW 750SCCM NC MFC-I-97=2M32
- Brooks GF125XSL Thermal Mass Flow GF125X-100122 Ver: 1.16 750SCCM 22-419562-00
Archived listings
Other Part Numbers & Aliases
GF125XSLBrooks GF125XSLBrooks Instrument GF125XSLBrooks Instruments GF125XSLGF125XSL MFCGF125X-10012222-419562-00