Flow Control
GF126CXXC
Brooks Instrument GF126 High-Flow Mass Flow Controller
About this part
GF126CXXC is a configured Brooks Instrument GF126 high-flow metal-sealed thermal mass flow controller identifier in the GF100 Series family. Official Brooks GF100 documentation identifies GF126 as the high-performance, high-flow PTI variant with a 5 Ra UHP wetted flow path and integrated pressure measurement, while the CXXC portion maps only to partial configuration context: MultiFlo capable, standard application, and normally closed valve. Gas, flow range, fittings, communication interface, downstream condition, and any customer-specific suffix details must still be verified from the complete unit label or build record
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
ManufacturerBrooks Instrument
Part numberGF126CXXC
Product familyGF100 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | Configured GF126 high-flow metal-sealed thermal mass flow controller |
| Series family | Brooks GF100 Series high-purity and ultra-high-purity thermal mass flow controllers and meters |
| Configured part number | GF126CXXC |
| GF126 role | Brooks ordering information identifies GF126 as the high-performance, high-flow model with pressure transient insensitivity |
Configuration
| Partial code interpretation | In Brooks GF101/GF121/GF126 ordering tables, GF126 means 55 to 300 slm N2-equivalent high-flow package with 5 Ra UHP wetted flow path and integrated pressure measurement; C means MultiFlo capable; XX means standard application; the final C means normally closed valve |
| Configured-unit rule | GF126CXXC is an incomplete code fragment for a configured device; gas, full-scale flow range, fitting package, downstream condition, sensor orientation, connector, customer special request, auto shut-off, auto zero, and reference temperature require the full model code or unit label |
Applications
| Application domain | Semiconductor, MOCVD, thin-film, purge, and other high-purity gas flow control applications requiring an all-metal flow path |
Flow
| GF126 full-scale flow context | Brooks GF101/GF121/GF126 specifications list a 55 slm to 300 slm N2-equivalent full-scale flow range; the exact configured range for GF126CXXC must be read from the complete model code or unit label |
| Gas/range programmability | The C configurability code indicates MultiFlo-capable GF126 context; supported gas and range selections depend on the configured gas code or SH MultiFlo bin |
Performance
| Flow accuracy context | Brooks GF101/GF121/GF126 specifications list +/-1% of set point from 35-100% and +/-0.35% full scale from 2-35%, based on factory N2 calibration |
| Repeatability and reproducibility | Brooks GF101/GF121/GF126 specifications list repeatability and reproducibility as less than +/-0.15% of set point |
| Response time | Brooks GF101/GF121/GF126 specifications list normally closed valve response time as less than 1 second |
| Pressure transient insensitivity | Brooks ordering instructions identify GF126 as the high-performance, high-flow model with PTI |
Ratings
| Operating temperature range | 10 to 50 deg C in official Brooks GF101/GF121/GF126 specifications |
| Pressure ratings | Brooks GF101/GF121/GF126 specifications list controller maximum operating pressure as 75 psig and meter maximum operating pressure as 150 psig |
Materials
| Wetted path standard | Brooks GF101/GF121/GF126 specifications list SEMI F20 HP compliant wetted-material context |
| Wetted materials | Brooks GF101/GF121/GF126 specifications list 316L VIM/VAR, Hastelloy C-22, 316L stainless steel, 304 stainless steel, and KM-45 wetted material context |
| Surface finish context | Brooks product-code tables identify GF126 as a 5 Ra UHP wetted flow path package |
Mechanical
| Valve context | The final C in GF126CXXC maps to normally closed valve in the official GF101/GF121/GF126 product-code table |
Controls
| Communication interfaces | Brooks GF100-family documentation covers RS485/Analog, DeviceNet, and EtherCAT communication options; the actual connector and protocol require the full configured model code |
Display and diagnostics
| Diagnostics | Official GF101/GF121/GF126 specifications list status lights, alarms, top-mount integrated LCD context, and an RS485 diagnostic/service port depending on configuration |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records2Tracked historical listing records
Historical median price$249.99Based on archived listing records
Recorded price range$199.99 - $299.99Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $209.99 to $289.99. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument GF126CXXC Thermal Mass Flow Controller - UNIT ONLY / UNTESTED
- Brooks Instrument GF126CXXC Thermal Mass Flow Controller - SEALED + UNTESTED
Archived listings
Other Part Numbers & Aliases
GF126CXXCBrooks GF126CXXCBrooks Instrument GF126CXXC