Flow Control

MF50S

Brooks Instrument MF Series Smart Mass Flow Controller

About this part

MF50S is a Brooks Instrument MF Series Smart Mass Flow controller model. Brooks MF50S-MF64S documentation describes the weatherproof MF Series as based on the Brooks Smart Mass Flow 5850S-5864S concept, with IP65/NEMA 4X protection and Zone 2 hazardous-area context depending on configuration. Stored Sonisys auction records include N2, O2, CO2, Air, and H2 configured examples, so the exact gas, range, fittings, valve, and communication options should be read from the configured model code and unit label

Unit-specific configuration
Observed configuration

Historical listing records identify this part as N2 at 20 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part numberMF50S
Product family5850S
Device typeMass Flow Controller
Observed gasN2
Observed full-scale range20 SLM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeMF Series weatherproof smart thermal mass flow controller
Series familyBrooks MF50S-MF64S Smart Mass Flow family
Configuration
Configured-unit ruleGas, full-scale range, connection, valve, seal package, power, and communication options vary by configured model code
Enclosure
Environmental protectionMF Series documentation identifies IP65 and NEMA 4X weatherproof protection context
Hazardous-area context
Zone 2 availabilityMF Series documentation identifies certified Zone 2 use for applicable configurations
Controls
Control platformMF Series is based on Brooks Smart Mass Flow technology with adaptive control and analog or digital communication options depending on configuration
Flow
Series flow range contextMF Series documentation covers gas flow measurement/control from very low mln/min ranges through high lpm service depending on model and configuration
Applications
Application domainOutdoor, biotech, process gas, industrial, and semiconductor gas-flow control applications requiring weatherproof instrumentation
Observed variants
Stored auction gas/range combinationsStored titles include N2 20 SLM, N2 12 SLM, N2 3 SLM, CO2 3 SLM, CO2 5 SLM, O2 20 SLM, Air 7.5 SLM, H2, and 50 SCCM contexts

Documentation Downloads

Local PDF copies

Part Photos

11 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records40Tracked historical listing records
Historical median price$303.68Based on archived listing records
Recorded price range$29.99 - $2,250.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $49.79 to $2,250.00. Based on 40 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • BROOKS INSTRUMENT MF50S GAS H2 FREE EXPEDITED SHIPPING
  • Brooks Instrument MF50S Smart Mass Flow

Archived listings

Other Part Numbers & Aliases

MF50SBrooks MF50SBrooks Instrument MF50SBrooks Instruments MF50S