Celerity FC-261HTV-6S Elastomer-Sealed Mass Flow Controller
About this part
TN260 is a legacy Celerity elastomer-sealed mass-flow-controller series related to the Tylan FC260/FM360 product family and covered by Brooks Instrument legacy-model guidance. The archived unit carries configured model FC-261HTV-6S; the documented 6S connection code denotes 3/8-inch Swagelok fittings. Gas calibration and full-scale flow are configured-unit attributes rather than universal TN260 specifications
Configurations vary. Verify the exact unit before choosing a replacement.
ManufacturerCelerity TN260 / Tylan FC260-FM360 legacy mass-flow family
Part numberTN260
Product familyGF40 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Series
Celerity TN260
Configured model
FC-261HTV-6S
Construction
Product type
Elastomer-sealed mass flow controller
Configuration
Process connection
3/8-inch Swagelok (6S connection code)
FC261 family
Published standard full-scale range
6–20 SLM; the archived 30 SLPM unit is a nonstandard or custom configuration
Pressure drop
15–40 psid
Performance
Step response time
6 seconds, dependent on requested step and operating conditions
Accuracy
±1% of full scale
Linearity
0.5% of full scale
Repeatability
±0.2% of full scale
Control range
50:1, corresponding to 100%–2% of full scale
Mounting sensitivity
May be mounted in any position without zero adjustment
Mechanical
Materials and seals
Type 316 stainless steel with Viton, Kalrez, or Neoprene seals selected for the gas application
Leak integrity
1 × 10^-9 atm·cc/s helium
Electrical
Analog output
0–5 VDC; 5 V represents full scale
Command signal
0–5 VDC with 2.5 kΩ maximum source impedance; 4–20 mA was available as an option
Input power
+15 VDC ±4% at 25 mA maximum and −15 VDC ±4% at 180 mA maximum for flow controllers
Power consumption
4.0 W maximum for flow controllers
Minimum output load resistance
2,000 Ω
Environmental
Operating temperature
5–43 °C (40–110 °F)
Temperature coefficient
±0.1%/°C
Pressure coefficient
±0.007%/psi
Reference conditions
Standard temperature and pressure
0 °C and 760 mm Hg absolute, following SEMI E12-91
Configuration-code interpretation
The complete marking combines a product series, configured controller model, configuration letters, connection code, and calibration data.
Marking
Meaning
Technical boundary
TN260
Celerity elastomer-sealed controller series
Series designation; it does not define one gas, range, or fitting.
FC-261
Configured mass flow controller model
The manufacturer profile places standard FC261 controllers in the 6–20 SLM range.
HTV
Configuration letters
No authoritative legacy code key was located; preserve these letters without assigning seal, valve, or electrical meanings.
6S
3/8-inch Swagelok process connection
Decoded directly from the manufacturer-issued family profile.
AIR / 30 SLPM
Observed calibration gas and full-scale marking
Applies to the archived configured unit, not every TN260 or FC261.
Published range and archived configuration
The archived unit’s stated flow exceeds the standard FC261 range in the manufacturer profile.
Published FC261 range6–20 SLM
Archived unit marking30 SLPM AIR
InterpretationThe HTV configuration is likely a custom or nonstandard build. The 30 SLPM value should be retained only as configured-unit label data and verified from the instrument label or calibration certificate before service.
Legacy replacement guidance
Brooks Instrument lists several current or later product families as replacement candidates for legacy FC261 controllers. Selection requires matching the original gas, full-scale flow, seals, process connection, pressure conditions, electrical interface, and valve behavior.
