Flow Control
5850EC-100803
Brooks Instrument 5850E Mass Flow Controller
About this part
5850EC-100803 is a configured Brooks Instrument 5850E thermal gas mass flow controller identifier observed in Sonisys auction history and current marketplace evidence. Official Brooks 5800E / 5850E documentation verifies the 5850E platform as an elastomer-sealed analog gas mass flow controller; exact gas, full-scale range, process connection, connector, valve state, and seal package remain configured-unit details that should be verified from the physical unit label or calibration paperwork
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
ManufacturerBrooks Instrument
Part number5850EC-100803
Product family5850E
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Part identifier | 5850EC-100803 |
| Device type | Thermal gas mass flow controller |
| Series family | Brooks 5800E / 5850E elastomer-sealed analog gas mass flow controller series |
Configuration
| Configured-unit rule | Gas, full-scale range, process fitting, connector, valve state, and seal package vary by configured model code and physical unit label |
Function
| Control architecture | Official 5850E documentation describes a flow sensor, control valve, and integral electronic control system used to produce stable gas flow |
Flow
| 5850E N2-equivalent range context | Brooks 5800E data-sheet context lists the 5850 / 5860 row with 0.003 slpm minimum full scale and 30 slpm maximum full scale nitrogen equivalent |
Performance
| 5850E accuracy context | +/-1% full scale including linearity at calibration conditions; higher-flow variants may have separate accuracy limits |
| 5850E repeatability context | 0.25% of rate repeatability and reproducibility |
| 5850E response context | Less than 3 seconds settling time to within +/-2% full scale for a 0 to 100% command step |
| 5850E control range context | 50:1 |
Pressure
| 5850E working pressure context | Brooks 5800E data-sheet context lists a 1500 psi / 100 bar standard pressure rating for the 5850 / 5860 model row |
| 5850E differential pressure context | Brooks 5800E data-sheet context lists 5 to 50 psi differential pressure for controller configurations, with process-dependent exceptions noted by Brooks |
Environmental
| Operating temperature context | 5 C to 65 C operating temperature range |
Electrical
| 5850E command input | 0-5 Vdc command input with 200 k ohm input resistance |
| 5850E flow output | 0-5 Vdc output into a 2000 ohm or greater load |
| 5850E connector options | Card-edge connector or 15-pin male Sub-D DA-15P connector, depending on configuration |
Materials
| 5800E wetted-material context | Official 5800E data-sheet context lists 316L stainless steel, high-alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, and Teflon among primary wetted materials, depending on configuration |
Leak integrity
| External helium leak integrity | Brooks 5800E data-sheet context lists 1 x 10^-9 atm cc/sec helium external leak integrity |
Mechanical
| Process connection context | Official 5800E data-sheet context lists 5850E / 5860E compression-fitting, VCO, and VCR dimensional options; the installed connection for this configured code must be verified from the unit |
Controls
| Valve override | Official 5850E documentation describes valve override for fully opening or closing the control valve independent of command setting |
| Soft start | Official 5850E documentation describes soft start as a flow-ramping function for processes that cannot tolerate rapid flow transition |
Applications
| Application domain | Semiconductor, laboratory, analytical, chemical and petrochemical research, fuel-cell, life-science, and general gas-flow applications |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records2Tracked historical listing records
Historical median price$1,639.87Based on archived listing records
Recorded price range$1,558.81 - $1,720.93Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $1,575.02 to $1,704.72. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- 1Pcs New BROOKS 5850EC-100803 flow meter Shipping DHL or FedEX
Archived listings
Other Part Numbers & Aliases
5850EC-100803Brooks 5850EC-100803Brooks Instrument 5850EC-100803