Flow Control

5850EC4BE2CF2A

Brooks Instrument 5850E Mass Flow Controller

About this part

5850EC4BE2CF2A is a configured Brooks Instrument 5850E Series thermal gas mass flow controller identifier observed in Sonisys auction history. Official Brooks 5800E / 5850E documentation verifies the 5850E as an elastomer-sealed analog gas mass flow controller platform. Stored auction evidence for this exact configured code identifies xenon with a 10 SCCM observed flow context, but exact gas calibration, full-scale range, fitting, connector, valve state, and seal package should be verified from the physical unit label or calibration paperwork

Unit-specific configuration
Observed configuration

Historical listing records identify this part as Xenon at 10 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

Key Facts

ManufacturerBrooks Instrument
Part number5850EC4BE2CF2A
Product family5850E
Device typeMass Flow Controller
Observed gasXenon
Observed full-scale range10 SCCM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Part identifier5850EC4BE2CF2A
Device typeThermal gas mass flow controller
Series familyBrooks 5800E / 5850E elastomer-sealed analog gas mass flow controller series
Configuration
Configured-unit ruleGas, full-scale range, process fitting, connector, valve state, and seal package vary by configured model code and physical unit label
Function
Control architectureOfficial 5850E documentation describes a flow sensor, control valve, and integral electronic control system used to produce stable gas flow
Flow
5850E standard range contextBrooks 5800E data-sheet context lists the 5850E / 5860E model row with 0.003 slpm minimum full scale and 30 slpm maximum full scale nitrogen equivalent
Performance
5850E accuracy context+/-1% full scale including linearity at calibration conditions; higher-flow variants are specified separately
5850E repeatability context0.25% of rate repeatability and reproducibility
5850E response time contextLess than 3 seconds settling time to within +/-2% full scale for a 0 to 100% command step
5850E control range context50:1
Pressure
5850E pressure rating contextBrooks 5800E data-sheet context lists a 1500 psi / 100 bar standard pressure rating for the 5850E / 5860E model row
Controller pressure differential contextBrooks 5850E documentation lists 5 to 50 psi differential pressure for 5850E controller configurations, with minimum pressure drop dependent on gas and range
Environmental
Operating temperature context5 C to 65 C
Electrical
5850E command input0-5 Vdc command input with 200 k ohm input resistance
5850E flow output0-5 Vdc output into 2000 ohms or greater
5850E connector optionsCard-edge connector or 15-pin male Sub-D DA-15P connector, depending on configuration
Materials
5800E wetted-material contextOfficial 5800E data-sheet context lists 316L stainless steel, high-alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, and Teflon among primary wetted materials, depending on configuration
Leak integrity
External helium leak integrityBrooks 5850E documentation lists 1 x 10^-9 atm cc/sec helium external leak integrity
Mechanical
Process connection contextBrooks 5800E data-sheet context lists 1/8 inch, 1/4 inch, and 3/8 inch compression fitting options plus 1/4 inch VCO and VCR options for the 5850E / 5860E model row
Controls
Valve overrideOfficial 5850E documentation describes valve override for fully opening or closing the control valve independent of command setting
Soft startOfficial 5850E documentation describes soft start as a flow-ramping function for processes that cannot tolerate rapid flow transition
Applications
Application domainSemiconductor, laboratory, analytical, chemical and petrochemical research, fuel-cell, life-science, and general gas-flow applications
Observed variants
Stored auction gas and range contextStored auction records for this exact configured code identify xenon and 10 SCCM in two listing records; this is observed listing context, not an official universal specification

Documentation Downloads

Local PDF copies

Part Photos

5 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records2Tracked historical listing records
Historical median price$195.00Based on archived listing records
Recorded price range$195.00 - $195.00Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $195.00 to $195.00. Based on 2 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • NASA Owned Brooks 5850E Mass Flow Controller 5850EC4BE2CF2A 10 SCCM Xenon Gas

Archived listings

Other Part Numbers & Aliases

5850EC4BE2CF2ABrooks 5850EC4BE2CF2ABrooks Instrument 5850EC4BE2CF2A