Brooks Instrument 5850E Series Mass Flow Controller
About this part
9308HC020556/1 is a configured Brooks Instrument identifier observed on Brooks 5850E Series thermal gas mass flow controllers in Sonisys stored auction evidence. Official Brooks 5800E/5850E documentation verifies the 5850E as an elastomer-sealed analog gas mass flow controller platform; gas, full-scale range, fittings, connector, valve state, seals, and calibration remain configured-unit details that should be verified from the physical unit label or calibration record. Stored exact-listing evidence observes argon configurations at 50 SCCM and 100 SCCM, which is retained as archive configuration context rather than a model-wide specification
Unit-specific configuration
Observed configuration
Historical listing records identify this part as Argon at 100 SCCM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Part identifier
9308HC020556/1
Observed device type
Brooks 5850E Series thermal gas mass flow controller
Series family
Brooks 5800E / 5850E elastomer-sealed analog gas mass flow controller series
Configuration
Configured-unit rule
Gas, full-scale range, process fitting, connector, valve state, seal package, and calibration can vary by configured unit and must be verified from the nameplate or calibration documentation
Observed configuration
Stored auction gas and range
Argon configurations at 50 SCCM and 100 SCCM are observed in stored exact-part auction evidence; these observations are not official model-wide specifications
Flow
5850E standard range context
Brooks 5800E/5850E documentation lists 5850E-family nitrogen-equivalent full-scale ranges from 0.003 slpm to 30 slpm
Performance
5850E accuracy context
Brooks documentation lists 1% full-scale flow accuracy including linearity at calibration conditions for the 5800E family
5850E repeatability context
Brooks documentation lists repeatability and reproducibility as 0.25% of rate
5850E response time context
Brooks documentation lists settling time under 3 seconds to within +/-2% full scale for a 0-100% command step
5850E control range context
Brooks documentation lists a 50:1 control range
Pressure
5850E pressure context
Brooks 5800E data sheet lists the 5850/5860 model row with a 1500 psi / 100 bar standard pressure rating and 5 psi / 0.35 bar to 50 psi / 3.45 bar controller differential-pressure context
Environmental
5850E operating temperature context
Brooks 5800E data sheet lists 5 C to 65 C operating temperature range
Electrical
5850E command and output context
Brooks documentation lists 0-5 Vdc setpoint input and 0-5 Vdc output for 5850E controller configurations
5850E connector context
Brooks documentation lists 15-pin male Sub-D DA-15P or card-edge electrical connector options for controller models
Materials
5850E wetted-material context
Brooks 5800E data sheet lists primary wetted materials including 316L stainless steel, high alloy stainless steel, Viton fluoroelastomers, Buna-N, Kalrez, and Teflon
Controls
Valve and control electronics
Brooks 5850E manual describes the controller as combining a flow sensor, control valve, and integral electronic control system for stable gas flow control
Applications
Application domain
Gas-flow control in semiconductor, laboratory, analytical, chemical, petrochemical, fuel-cell, life-science, and general industrial gas-handling applications
