Brooks Model 5876 Dual-Channel Mass Flow Power Supply, Readout and Control Unit
About this part
Brooks Model 5876 is a two-channel secondary-electronics unit for powering, reading, and setting compatible external mass flow controllers. It provides local, remote, and master/slave blending control for 0–5 Vdc flow and setpoint signals. The connected mass flow controller—not the 5876—determines the gas, full-scale range, valve, fittings, pressure rating, and calibration
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Manufacturer
Brooks Instrument B.V
Product series
5870 Series control and readout equipment
Model
5876
Control
Channels
2
Function
Power supply, flow readout, and setpoint control for external mass flow controllers
Power
Mains input
110 or 220 Vac ±10%, 50/60 Hz
Controller supply output
+15 Vdc and −15 Vdc
Power consumption
15 W
Signals
Flow-rate input
0–5 Vdc
Setpoint signal
0–5 Vdc; internal signal-source resistance 300 Ω maximum
Reference output
5 Vdc; 8 mA maximum load
Flow-rate output
0–5 Vdc, linear with flow rate
Display
Indicator
3½-digit LED; 13 mm character height; 199.9 maximum reading
Displayed value
Percentage of the connected controller's full-scale flow range
Controls
Setpoint adjustment
5 kΩ ten-turn potentiometer for each channel, with locking lever and dial
Channel selection
Rotary display-selector switch
Setpoint modes
Local, remote, or blending
Connections
Controller connections
Two 15-pin D-type connectors
Combined signal output
One 15-pin D-type connector with 0–5 Vdc output for each channel
Mechanical
Housing
Anodized aluminum
Mounting
Tabletop or panel mounting
Environmental
Ambient operating temperature
0–50 °C
Compatibility
Controllers listed in the 1990 manual
Brooks 5850, 5851, 5858, and 5842 series
Control Modes
The Model 5876 can control two channels independently or operate them as a master/slave pair.
Mode
Documented behavior
Local
The front-panel potentiometer supplies the mass flow controller setpoint.
Remote
An external reference supplies the setpoint; the front-panel setpoint potentiometer is inactive.
Blending
Channel 1 is the master. Its measured flow signal becomes the reference for channel 2, whose potentiometer sets the slave-channel ratio.
Compatibility and Service Notes
The 1990 manual lists Brooks 5850, 5851, 5858, and 5842 mass flow controller series for use with Model 5876.
Brooks' 2008 Model 5964/5850EM manual also identifies Model 5876 as older secondary electronics. When it is used as a calibration power supply with a card-edge controller version, the controller's 5 V reference must be enabled.
An enabled 5 V reference output must not be grounded.
Identifier and Revision Boundary
The suffix-A OMEGA product is a different documented generation and must not supply specifications for this Brooks unit.
Verified target modelBrooks Model 5876
Excluded look-alike identifierOMEGA FMA-5876A is a later microprocessor-based FMA-5870A Series unit with different mains input, display, controls, and channel architecture. It is not an exact alias for Brooks Model 5876.
