Sonisys Industrial Part Archive

Flow Control

SLA7851DZ80

Brooks Instrument Elastomer-Sealed Digital Mass Flow Controller

About this part

SLA7851DZ80 is a Brooks Instrument SLA-Series elastomer-sealed digital thermal mass flow controller. It belongs to the high-flow branch of the SLA digital platform, the SLA7000/SLA7900-range counterparts to the standard-flow SLA5800 models such as SLA5851. Brooks documents the shared SLA elastomer-sealed digital MFC and MFM architecture, while the exact gas, flow range, valve, seals, fittings, and communication option of a configured SLA7851DZ80 are set by its full model code and should be confirmed from the device label or Brooks build record

Configurations vary. Verify the exact unit before choosing a replacement.

SpecificationsDocuments (1)Photos (2)Listing history
Brooks Instrument SLA7851DZ80 elastomer-sealed digital mass flow controller auction imageArchived part photo ยท View gallery

Key Facts

ManufacturerBrooks Instrument
Part numberSLA7851DZ80
Product familySLA7000 Series
Device typeMass Flow Controller
Configuration statusConfiguration varies
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
ManufacturerBrooks Instrument
Part numberSLA7851DZ80
SeriesSLA Series elastomer-sealed digital platform (SLA5800 standard-flow and SLA7000/SLA7900-range high-flow models)
Device
Device typeElastomer-sealed digital thermal mass flow controller
Application
Application domainIndustrial and semiconductor gas flow control
Performance
Sensor technology (family)Brooks thermal mass-flow sensing with digital signal processing for improved low-set-point signal-to-noise
Materials
Sealing (family)Elastomer-sealed flow path, distinct from the all-metal-sealed GF family
Flow
Multi-gas / multi-range (family)The SLA digital platform supports switching gas and range on a single device where the configuration allows
Controls
Communication options (family)The SLA digital platform documents analog/RS-485 plus digital fieldbus options such as DeviceNet, EtherCAT, EtherNet/IP, and PROFIBUS/PROFINET depending on configuration; the installed interface is set by the configured code and connector

SLA model-family context

Within the SLA elastomer-sealed digital line, the numeric block separates flow class and the meter/controller function. This context bounds which documented ranges apply to SLA7851DZ80.

Standard-flow controllersSLA5850, SLA5851, and SLA5853 are the standard-flow mass flow controllers.
Standard-flow metersSLA5860, SLA5861, and SLA5863 are the standard-flow mass flow meters.
High-flow branchSLA7000/SLA7900-range models (for example the SLA7950 and SLA7950S) are the high-flow counterparts; SLA7851 sits in this high-flow branch.
Exact configurationThe exact SLA7851 flow range and the 'DZ80' option string are decoded from the Brooks ordering guide or the device label, not assumed from the standard-flow data sheet.

Documentation Downloads

Local PDF copies
Brooks SLA5800 Series Elastomer-Sealed Digital MFC and MFM Data Sheet Local PDF download
PDF2.2 MB

Part Photos

2 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records1Tracked historical listing records
Historical median price$1,395.00Based on archived listing records
Recorded price range$1,395.00 - $1,395.00Low to high recorded listing price
Local documents1PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $1,395.00 to $1,395.00. Based on 1 archived listing record; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • Brooks Instrument SLA7851DZ80 Mass Flow Controller and Meter

Archived listings

Other Part Numbers & Aliases

SLA7851DZ80Brooks SLA7851DZ80Brooks Instrument SLA7851DZ80