Flow Control
SLA7950S
Brooks Instrument SLA7900 Series Metal-Sealed Mass Flow Controller
About this part
SLA7950S is a Brooks Instrument SLA7900 Series high-purity, metal-sealed thermal mass flow controller or meter configuration. Brooks documentation identifies SLA7950S as an analog-I/O SLA7950/SLA7960 form factor with 9-pin or 15-pin D-connector options, 0-5 V setpoint and flow signals, 13.5 to 27 VDC analog power, high leak integrity metal seals, and 0-3 sccm to 0-50 slpm N2-equivalent flow-range capability depending on the configured unit
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2O. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberSLA7950S
Product familySLA7900 Series
Device typeThermal Mass Flow Device
Observed gasN2O
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | High-purity metal-sealed thermal mass flow controller or meter |
| Series family | SLA7900 Series |
| Related documented models | Brooks Models SLA7950 and SLA7960 mass flow controllers and meters |
| SLA7950S interface identity | SLA7950S is documented as the analog-I/O model with 9-pin or 15-pin D-connector configurations |
Configuration
| Configured-unit rule | Gas, full-scale range, communication interface, valve state, and fittings vary by configured model code |
Applications
| Application domain | Advanced gas handling systems requiring high-purity or ultra-high-purity metal-sealed flow measurement and control |
Flow
| Flow range capability | Any range from 0-3 sccm to 0-50 slpm N2 equivalent for SLA7950/SLA7960 models |
| Turndown | 100:1 for full-scale ranges from 1 to 50 slpm; 50:1 for full-scale ranges below 1 slpm |
Performance
| Accuracy | +/-1.0% of rate including linearity from 20% to 100% full scale; +/-0.2% of full scale below 20% full scale |
| Repeatability | +/-0.20% of rate |
| Settling time | Less than 1 second for step changes above 5% full scale |
| Long-term drift | Less than 0.2% per year |
| Mounting attitude sensitivity | 0.2% of full-scale maximum deviation after rezeroing |
Pressure
| Maximum operating pressure | 1500 psig maximum; 150 psig and below recommended for best performance |
| Differential pressure range | 5 to 50 psid, with broader ranges depending on customer conditions |
Leak integrity
| Inboard-to-outboard leak rate | Less than 1 x 10^-10 atm scc/sec helium maximum |
| Valve leak-by | Less than 0.5% full scale |
Materials
| Wetted materials | 316L Vacuum Arc Remelt stainless steel, 316L stainless steel, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel valve seat |
| Wetted surface finish | Electropolished to 5 Ra |
Connections
| Process connections | 1/4 inch male VCR, CS seal, C seal, and W seal configurations |
Controls
| Analog I/O | 0-5 V setpoint and flow signals with separate valve-override signal |
| Analog connectors | 9-pin or 15-pin male D-connector options |
| RS-485 option | 15-pin D-connector RS-485 option using Brooks S-Protocol based on HART |
| DeviceNet family option | SLA7950D and related SLA7000/SLA7900 DeviceNet variants use a 5-pin Micro-Connector and ODVA mass-flow-controller profile support |
Electrical
| Analog power supply | 13.5 to 27 VDC, 15 VDC nominal |
| Analog or RS-485 power requirement with valve | 4.2 W typical, 4.6 W maximum |
| DeviceNet power requirement with valve | 6.3 W typical, 6.9 W maximum for DeviceNet family variants |
Environment
| Operating ambient temperature | 0 C to 65 C (32 F to 149 F) |
| Non-operating ambient temperature | -25 C to 100 C (-13 F to 212 F) |
Cleanliness
| Particulate specification | Zero particles per cubic foot greater than 0.1 microns under process conditions; less than 4 particles per cubic foot greater than 0.02 microns under process conditions |
Functionality
| Calibration storage | Device can store 10 selectable calibration and flow ranges |
Observed variants
| Stored auction gas/range combinations | N2O (12), NF3 15 SLM (11), SIH4 300 SCCM (4), AR 3 SLM (4), N2O 15 SLM (3), 30 SCCM (2), AR 3000 SCCM (1), HE 5 SLM (1) |
Documentation Downloads
Local PDF copiesPart Photos
17 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records42Tracked historical listing records
Historical median price$212.87Based on archived listing records
Recorded price range$99.00 - $1,260.10Low to high recorded listing price
Local documents3PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $180.59 to $380.90. Based on 42 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks SLA7950S MFC Mass Flow Controller 15 SLPM N2O
- [10388]BROOKS SLA7950S _ GAS:NF3 _ 15 SLPM _MFC/Fedex
- [10392]BROOKS SLA7950S _ GAS:N20 _ 2000 SCCM_ MFC/Fedex
- [10389]BROOKS SLA7950S _ GAS:N20 _ 2000 SCCM_ MFC/Fedex
- BROOKS 1-888-554-FLOW USED SLA7950S NF3 15 SLPM DELTA CLASS SMART MFC-I-78=2M32
- BROOKS USED SLA7950S SiH4 300SCCM DELTA CLASS SMART MASS FLOW MFC-I-76=2M32
Archived listings
Other Part Numbers & Aliases
SLA7950SSLA 7950SSLA7950SLA7900Brooks SLA7950SBrooks Instrument SLA7950SDelta Class SLA7950SSLA7950S MFCSLA7950S MFM