Flow Control
SLA7950S1EGG1D2A1
Brooks Instrument SLA7900 Series Metal-Sealed Mass Flow Controller
About this part
SLA7950S1EGG1D2A1 is a configured Brooks Instrument SLA7950S / SLA7900 Series high-purity, metal-sealed digital thermal mass flow controller identifier. Brooks SLA7900 documentation covers SLA7950 and SLA7960 mass flow controllers and meters for advanced gas handling systems; exact gas, flow range, valve behavior, fittings, and communication details should still be verified from the unit label for this configured code
Unit-specific configuration
Observed configuration
Historical listing records identify this part as H2 at 2 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Key Facts
ManufacturerBrooks Instrument
Part numberSLA7950S1EGG1D2A1
Product familySLA7900 Series
Device typeMass Flow Controller
Observed gasH2
Observed full-scale range2 SLM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Device type | High-purity metal-sealed digital thermal mass flow controller |
| Series family | SLA7900 Series |
| Related documented models | Brooks Models SLA7950 and SLA7960 mass flow controllers and meters |
| Base model interpretation | SLA7950S records belong to the analog-I/O SLA7950 family, commonly shown with 9-pin or 15-pin D-connector configurations |
Configuration
| Configured-unit rule | Gas, full-scale range, process connection, valve state, and any customer-specific calibration options vary by configured model code and nameplate |
Applications
| Application domain | Advanced high-purity and ultra-high-purity gas handling systems, including semiconductor process gas flow measurement and control |
Flow
| Series flow range capability | Any range from 0-3 sccm to 0-50 slpm N2 equivalent for SLA7950/SLA7960 models |
| Turndown | 100:1 for full-scale ranges from 1 to 50 slpm; 50:1 for full-scale ranges below 1 slpm |
Performance
| Accuracy | +/-1.0% of rate including linearity from 20% to 100% full scale; +/-0.2% of full scale below 20% full scale |
| Repeatability | +/-0.20% of rate |
| Settling time | Less than 1 second for step changes above 5% full scale |
| Long-term drift | Less than 0.2% per year |
Pressure
| Maximum operating pressure | 1500 psig maximum; 150 psig and below recommended for best performance |
| Differential pressure range | 5 to 50 psid, with broader ranges depending on customer conditions |
Leak integrity
| Inboard-to-outboard leak rate | Less than 1 x 10^-10 atm scc/sec helium maximum |
| Valve leak-by | Less than 0.5% full scale |
Materials
| Wetted materials | 316L Vacuum Arc Remelt stainless steel, 316L stainless steel, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel valve seat |
| Wetted surface finish | Electropolished to 5 Ra |
Connections
| Process connections | 1/4 inch male VCR, CS seal, C seal, and W seal configurations depending on ordered model |
Controls
| Analog I/O | 0-5 V setpoint and flow signals with separate valve-override signal on analog SLA7950S configurations |
| Analog connectors | 9-pin or 15-pin male D-connector options |
| Digital service interface | SLA7900 instruments are digital internally and support Brooks service/configuration workflows; communication options depend on the ordered configuration |
Electrical
| Analog power supply | 13.5 to 27 VDC, 15 VDC nominal |
| Analog or RS-485 power requirement with valve | 4.2 W typical, 4.6 W maximum |
Environment
| Operating ambient temperature | 0 C to 65 C (32 F to 149 F) |
| Non-operating ambient temperature | -25 C to 100 C (-13 F to 212 F) |
Cleanliness
| Particulate specification | Zero particles per cubic foot greater than 0.1 microns under process conditions; less than 4 particles per cubic foot greater than 0.02 microns under process conditions |
Functionality
| Calibration storage | Device can store 10 selectable calibration and flow ranges |
Observed variants
| Stored auction gas/range combinations | H2 2 SLM (1), H2 3 SLM (1), AR 3 SLM (1), AR 1 SLM (1), NF3 1 SLM (1) |
Documentation Downloads
Local PDF copiesPart Photos
25 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records5Tracked historical listing records
Historical median price$299.90Based on archived listing records
Recorded price range$299.90 - $299.90Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $299.90 to $299.90. Based on 5 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- Brooks Instrument mass flow controller MFC SLA7950S1EGG1D2A1 AR 1 SLPM
- Brooks Instrument mass flow controller MFC SLA7950S1EGG1D2A1 NF3 1 SLPM
- Brooks Instrument mass flow controller MFC SLA7950S1EGG1D2A1 H2 3 SLPM
- Brooks Instrument mass flow controller MFC SLA7950S1EGG1D2A1 AR 3 SLPM
- Brooks Instrument mass flow controller MFC SLA7950S1EGG1D2A1 H2 2 SLPM
Archived listings
Other Part Numbers & Aliases
SLA7950S1EGG1D2A1SLA7950S1 EGG1D2A1Brooks SLA7950S1EGG1D2A1Brooks Instrument SLA7950S1EGG1D2A1