Flow Control
SLA7950S1EGG1M1E1
Brooks Instrument SLA7900 Series Metal-Sealed Mass Flow Controller
About this part
SLA7950S1EGG1M1E1 is a configured Brooks Instrument SLA7950S / SLA7900 Series high-purity metal-sealed thermal mass flow controller. Stored auction records for this exact code show two configured gas/range contexts: NF3 at 15 SLPM and N2O at 20 SLPM. Brooks SLA7900 documentation identifies SLA7950/SLA7960 as a 1.125 inch wide-profile high-purity metal-sealed thermal mass flow controller and meter platform for advanced gas handling systems
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2O at 20 SLPM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
ManufacturerBrooks Instrument
Part numberSLA7950S1EGG1M1E1
Product familySLA7900 Series
Device typeMass Flow Controller
Observed gasN2O
Observed full-scale range20 SLPM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Part identifier | SLA7950S1EGG1M1E1 |
| Device type | High-purity metal-sealed thermal mass flow controller |
| Series family | Brooks SLA7900 Series, including SLA7950 mass flow controllers and SLA7960 mass flow meters |
| Base model | SLA7950S |
Interface
| SLA7950S platform context | Brooks SLA7900 documentation shows SLA7950S examples with analog I/O, 9-pin or 15-pin D-connector options, and VCR or downport connection layouts |
Function
| Control function | Thermal mass flow measurement and valve control for high-purity process gases |
Applications
| Application domain | Advanced gas handling systems, semiconductor gas boxes, high-purity process gas delivery, and legacy tool service |
Mechanical
| Body platform | SLA7900 documentation describes a 1.125 inch wide-profile mechanical platform |
Flow
| Family flow-range span | Brooks SLA7900 documentation lists SLA7950/SLA7960 ranges from 0-3 sccm to 0-50 slpm nitrogen equivalent |
| Stored NF3 configuration | Stored auction titles identify SLA7950S1EGG1M1E1 units configured for NF3 at 15 SLPM |
| Stored N2O configuration | Stored auction titles identify SLA7950S1EGG1M1E1 units configured for N2O at 20 SLPM; some titles spell the gas as N20 |
Observed variants
| Additional gas example | Listing evidence also shows an SLA7950S1EGG1M1E1 unit configured for SiH4 at 0.5 SLPM |
Performance
| Accuracy | SLA7900 documentation lists +/-1.0% of rate including linearity from 20% to 100% full scale and +/-0.2% full scale below 20% full scale |
| Repeatability | SLA7900 documentation lists repeatability of +/-0.20% of rate |
| Settling time | SLA7900 documentation lists settling time less than 1 second for step changes above 5% full scale |
| Control range | SLA7900 documentation lists 100:1 turndown for full-scale ranges from 1 to 50 slpm and 50:1 turndown for full-scale ranges below 1 slpm |
| Mounting attitude sensitivity | SLA7900 documentation lists 0.2% full-scale maximum deviation after rezeroing |
| Long-term drift | SLA7900 documentation lists long-term sensor drift performance below 0.2% per year |
Pressure
| Maximum operating pressure | SLA7900 documentation lists 1500 psig / 10,342 kPa maximum operating pressure range, with 150 psig and below recommended for best performance |
| Differential pressure context | SLA7900 documentation lists 5 to 50 psid typical differential pressure range, with 30 psid minimum noted for flows above 30 slpm nitrogen equivalent |
Temperature
| Ambient operating range | SLA7900 documentation lists 0 C to 65 C / 32 F to 149 F operating ambient temperature limits |
Materials
| Wetted surface finish | SLA7900 documentation states all wetted surfaces are electro-polished to 5 Ra |
| Wetted materials | SLA7900 documentation lists 316L VAR, 316L, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel standard valve seat material |
Leak integrity
| Internal-to-external leak integrity | SLA7900 documentation lists inboard-to-outboard leak integrity less than 1 x 10^-10 atm scc/sec helium |
Valve
| Valve leak-by | SLA7900 documentation lists valve leak-by below 0.5% full scale |
Connections
| Process connection options | SLA7900 documentation lists 1/4 inch male VCR, CS seal, C seal, and W seal process connection options |
Electrical
| Analog electrical connections | SLA7900 documentation lists analog I/O with 9-pin or 15-pin male D-connectors |
| Analog signal options | SLA7900 documentation lists 0-5 V setpoint and flow signals, with 4-20 mA setpoint and flow options on 15-pin analog I/O versions |
| Analog power | SLA7900 documentation lists 13.5 Vdc to 27 Vdc power for analog I/O versions |
Digital options
| Communication options | SLA7900 documentation identifies DeviceNet and RS-485/S-Protocol digital communication options on applicable configurations |
Calibration
| Selectable calibrations | SLA7900 documentation states the device can store 10 selectable calibrations and flow ranges |
Configuration
| Configured-unit rule | Gas calibration, full-scale range, connector type, communication option, process connection, valve tuning, and installed tool compatibility must be verified from the unit label and system configuration |
Condition
| Stored condition context | All stored auction records for this slug are marked used |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records12Tracked historical listing records
Historical median price$225.74Based on archived listing records
Recorded price range$180.59 - $225.74Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $185.11 to $225.74. Based on 12 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- [10391]BROOKS SLA7950S1EGG1M1E1 _ GAS:N20 _ 20 SLPM_ MFC/Fedex
- [10390]BROOKS SLA7950S1EGG1M1E1 _ GAS:NF3 _ 15 SLPM_ MFC/Fedex
Archived listings
Other Part Numbers & Aliases
SLA7950S1EGG1M1E1Brooks SLA7950S1EGG1M1E1Brooks Instrument SLA7950S1EGG1M1E1Brooks SLA7950S 1EGG1M1E1SLA7950S 1EGG1M1E1Brooks SLA7950SBrooks SLA7900 SLA7950S