Sonisys Industrial Part Archive

Flow Control

SLA7950S1EGG1B2A1

Brooks Instrument SLA7900 Metal-Sealed Mass Flow Controller

About this part

SLA7950S1EGG1B2A1 is a configured Brooks Instrument SLA7950S / SLA7900 Series metal-sealed thermal mass flow controller. Official SLA7900 documentation supplies the family-level technical context for the SLA7950S analog model, while stored auction records show multiple observed gas/range configurations for this exact code, including Argon 3 SLM, Argon 500 SCCM, Oxygen 500 SCCM, NF3 5 SLM, NF3 10 SLM at 25 psig, Silane context, and Helium 20 SLM. Those gas/range values are treated as observed unit history, not as one universal fixed configuration

Unit-specific configuration
Observed configuration

Historical listing records identify Ar at 3 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.

Configurations vary. Verify the exact unit before choosing a replacement.

SpecificationsDocuments (2)Photos (16)Listing history
Brooks SLA7950S1EGG1B2A1 SLA7900 Series auction imageArchived part photo ยท View gallery

Key Facts

ManufacturerBrooks Instrument
Part numberSLA7950S1EGG1B2A1
Product familySLA7900 Series
Device typeMass Flow Controller
Observed gasAr
Observed full-scale range3 SLM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control

Specifications

Identification
Device typeHigh-purity metal-sealed thermal mass flow controller
Series familySLA7900 Series
Related documented modelsBrooks Models SLA7950 and SLA7960 mass flow controllers and meters
Configured model codeSLA7950S1EGG1B2A1
SLA7950S interface identitySLA7950S is documented as an analog-I/O model with 9-pin or 15-pin D-connector configurations
Configuration
Configured-unit ruleGas, full-scale range, pressure label, valve state, fittings, and calibration are configured-unit details and must be verified from the unit label
Applications
Application domainAdvanced high-purity and ultra-high-purity gas handling systems
Flow
Family flow-range capabilityAny range from 0-3 sccm to 0-50 slpm N2 equivalent for SLA7950/SLA7960 models
Turndown100:1 for full-scale ranges from 1 to 50 slpm; 50:1 for full-scale ranges below 1 slpm
Performance
Accuracy+/-1.0% of rate including linearity from 20% to 100% full scale; +/-0.2% of full scale below 20% full scale
Repeatability+/-0.20% of rate
Settling timeLess than 1 second for step changes above 5% full scale
Long-term driftLess than 0.2% per year
Pressure
Maximum operating pressure1500 psig maximum; 150 psig and below recommended for best performance
Observed pressure context25 psig appears in a stored/NF3 10 SLM listing for this exact code
Leak integrity
Inboard-to-outboard leak rateLess than 1 x 10^-10 atm scc/sec helium maximum
Valve leak-byLess than 0.5% full scale
Materials
Wetted materials316L Vacuum Arc Remelt stainless steel, 316L stainless steel, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel valve seat
Wetted surface finishElectropolished to 5 Ra
Connections
Process connection family1/4 inch male VCR, CS seal, C seal, and W seal configurations
Controls
Analog I/O0-5 V setpoint and flow signals with separate valve-override signal
Analog connectors9-pin or 15-pin male D-connector options
RS-485 option15-pin D-connector RS-485 option using Brooks S-Protocol based on HART
Electrical
Analog power supply13.5 to 27 VDC, 15 VDC nominal
Analog or RS-485 power requirement with valve4.2 W typical, 4.6 W maximum
Environment
Operating ambient temperature0 C to 65 C / 32 F to 149 F
Non-operating ambient temperature-25 C to 100 C / -13 F to 212 F
Functionality
Calibration storageDevice can store 10 selectable calibration and flow ranges
Observed variants
Stored auction gas/range combinationsArgon 3 SLM, Argon 500 SCCM, Oxygen 500 SCCM, NF3 5 SLM, NF3 10 SLM, Helium 20 SLM, and Silane context appear in stored listing evidence

Documentation Downloads

Local PDF copies
Brooks SLA7900 Series Data Sheet Local PDF download
PDF550 KB
 Brooks SLA7950-SLA7960 Installation and Operation Manual Local PDF download
PDF1.7 MB

Part Photos

16 images

Historical archive images for identification, labels, connectors, and condition reference, not current inventory.

Historical Listings & Prices

Historical listing data, not a current offer
Archive records13Tracked historical listing records
Historical median price$300.00Based on archived listing records
Recorded price range$64.79 - $1,171.99Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context

The typical recorded price range is $89.81 to $1,171.99. Based on 13 archived listing records; not a current offer, appraisal, or confirmed sale price.

View archived listing titles
  • BROOKS INSTRUMENT SLA7950S1EGG1B2A1 FLOW METER
  • BROOKS USED SLA7950S1EGG1B2A1 ARGON 3SLPM CLASS SMART MASS FLOW MFC-I-83=2M32
  • BROOKS SLA7950S1EGG1B2A1 DELTA CLASS SMART MASS FLOW CONTROLLER HE 20 SLPM
  • BROOKS DELTA CLASS MASS FLOW CONTROLLER SLA7950S1EGG1B2A1 10SLPM NF3 25PSIG
  • BROOKS MFC SLA7950S1EGG1B2A1 AR 500SCCM
  • BROOKS MFC SLA7950S1EGG1B2A1 O2 500SCCM

Archived listings

Other Part Numbers & Aliases

SLA7950S1EGG1B2A1Brooks SLA7950S1EGG1B2A1Brooks Instrument SLA7950S1EGG1B2A1SLA7950SBrooks SLA7950SSLA7900Delta Class SLA7950SDelta Class Smart Mass Flow ControllerSLA7950S1EGG1B2A1 AR 500SCCMSLA7950S1EGG1B2A1 O2 500SCCMSLA7950S1EGG1B2A1 NF3 10SLPMSLA7950S1EGG1B2A1 HE 20 SLPM