Brooks Instrument SLA7900 Series Metal-Sealed Mass Flow Controller
About this part
SLA7951SZ139 is a configured Brooks Instrument SLA7900 Series metal-sealed thermal mass flow controller or meter identifier. Brooks-authored SLA7900/SLA7000 documentation supports the family-level high-purity metal-sealed MFC/MFM context, but no verified official exact SLA7951SZ139 build sheet or exact-part PDF is currently available in the reviewed sources. Stored Sonisys auction evidence identifies observed SLA7951SZ139 units as N2O 25 SLM configurations; gas, full-scale range, valve state, fittings, calibration, and communication interface should still be verified from the physical unit label
Unit-specific configuration
Observed configuration
Historical listing records identify this part as N2O at 25 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
Device type
Configured SLA7900 Series high-purity metal-sealed thermal mass flow controller or meter
Series family
Brooks SLA7900 Series; Brooks-authored family data covers Models SLA7950 and SLA7960 mass flow controllers and meters
Configured part number
SLA7951SZ139
Configuration
Configured-unit rule
SLA7951SZ139 is treated as a configured/OEM part identifier; gas, full-scale flow range, valve behavior, fitting package, power, communication interface, and calibration details must be confirmed from the unit label or configuration record
Applications
Application domain
Advanced gas handling systems requiring high-purity metal-sealed mass-flow measurement or control
Flow
SLA7900 family flow-range context
Brooks-authored SLA7900 data-sheet context lists SLA7950/SLA7960 family ranges from 0-3 sccm to 0-50 slpm N2 equivalent; the exact SLA7951SZ139 gas and range must be read from the unit label
Observed stored auction configuration
Stored exact-code auction evidence records N2O 25 SLM on two tracked listings; this is observed configuration evidence, not an official universal specification
Performance
Family accuracy context
Brooks-authored SLA7900 data-sheet context lists +/-1.0% of rate including linearity from 20% to 100% full scale and +/-0.2% full scale below 20% full scale for documented SLA7900 family models
Family repeatability and response context
Brooks-authored SLA7900 data-sheet context lists +/-0.20% of rate repeatability and less than 1 second settling time for step changes above 5% full scale
Pressure
Family pressure context
Brooks-authored SLA7900 data-sheet context lists 1500 psig maximum operating pressure, with 150 psig and below recommended for best performance; exact installed pressure conditions remain configuration-specific
Leak integrity
Family metal-seal context
Brooks-authored SLA7900 data-sheet context lists all-metal seals and inboard-to-outboard leak integrity less than 1 x 10^-10 atm scc/sec helium maximum
Materials
Family wetted-material context
Brooks-authored SLA7900 data-sheet context identifies 316L VAR stainless steel, 316L stainless steel, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel valve-seat material for documented family configurations
Family wetted-surface context
Brooks-authored SLA7900 data-sheet context describes wetted surfaces as electropolished to 5 Ra for documented family configurations
Connections
Family process-connection context
Brooks-authored SLA7900 documentation shows VCR and downport seal connection configurations for SLA7950/SLA7960 family models; exact SLA7951SZ139 fittings require unit-label or visual verification
Controls
Communication context
Brooks SLA7900 family context includes analog, RS-485, and DeviceNet-related documentation; the actual SLA7951SZ139 interface should be verified from the connector and label
Environment
Family operating ambient context
Brooks-authored SLA7900 data-sheet context lists operating ambient temperature from 0 C to 65 C and non-operating ambient temperature from -25 C to 100 C
Cleanliness
Family particulate context
Brooks-authored SLA7900 data-sheet context lists zero particles per cubic foot greater than 0.1 microns under process conditions and less than 4 particles per cubic foot greater than 0.02 microns under process conditions
