Flow Control
SLA7950S1UGG1D2E1
Brooks Instrument SLA7900 Metal-Sealed Mass Flow Controller
About this part
SLA7950S1UGG1D2E1 is a configured Brooks Instrument SLA7950S / SLA7900 Series metal-sealed thermal mass flow controller identifier. Brooks-authored SLA7900 documentation supplies the family-level technical context for SLA7950S analog-I/O configurations, while exact gas, flow range, pressure label, valve state, fittings, and calibration remain configured-unit properties that should be verified from the physical unit label. Stored Sonisys auction evidence for this exact code includes AR 10 SLM and N2O 25 SLM observations; additional surplus evidence shows NF3 10 SLM and HE 20 SLM / 45 PSIG observations
Unit-specific configuration
Observed configuration
Historical listing records identify this part as AR at 10 SLM. Exact gas, range, fittings, valve configuration, and communication interface must be verified from the physical unit label.
Configurations vary. Verify the exact unit before choosing a replacement.
No archived photo available
Key Facts
ManufacturerBrooks Instrument
Part numberSLA7950S1UGG1D2E1
Product familySLA7900 Series
Device typeMass Flow Controller
Observed gasAR
Observed full-scale range10 SLM
Configuration statusVerify from unit label
Application classSemiconductor/high-purity gas delivery
CategoryFlow Control
Specifications
Identification
| Part identifier | SLA7950S1UGG1D2E1 |
| Device type | High-purity metal-sealed thermal mass flow controller |
| Series family | Brooks SLA7900 Series; Brooks-authored family documentation covers Models SLA7950 and SLA7960 mass flow controllers and meters |
| SLA7950S platform context | Brooks SLA7900 documentation shows SLA7950S examples with analog I/O, 9-pin or 15-pin D-connector options, and VCR or downport connection layouts |
Configuration
| Configured-unit rule | Gas, full-scale flow range, pressure label, process connections, valve behavior, and calibration options vary by configured unit and should be checked from the unit label |
Applications
| Application domain | Advanced high-purity and ultra-high-purity gas handling systems, including semiconductor process gas flow measurement and control |
Flow
| Family flow-range capability | Brooks-authored SLA7900 data-sheet context lists any range from 0-3 sccm to 0-50 slpm N2 equivalent for SLA7950/SLA7960 models |
| Observed stored auction configurations | AR 10 SLM (2) and N2O 25 SLM (1) appear in stored Sonisys auction-title evidence for this exact configured code |
| Additional observed configurations | NF3 10 SLM and HE 20 SLM / 45 PSIG appear in surplus and listing evidence; these are observed configurations, not official model-wide specifications |
Performance
| Family accuracy context | Brooks-authored SLA7900 data-sheet context lists +/-1.0% of rate including linearity from 20% to 100% full scale and +/-0.2% full scale below 20% full scale |
| Family repeatability and response context | Brooks-authored SLA7900 data-sheet context lists +/-0.20% of rate repeatability and less than 1 second settling time for step changes above 5% full scale |
| Family long-term drift context | Brooks-authored SLA7900 data-sheet context lists long-term sensor drift performance below 0.2% per year |
Pressure
| Family pressure context | Brooks-authored SLA7900 data-sheet context lists 1500 psig maximum operating pressure, with 150 psig and below recommended for best performance |
Leak integrity
| Family metal-seal context | Brooks-authored SLA7900 data-sheet context lists all-metal seals and inboard-to-outboard leak integrity less than 1 x 10^-10 atm scc/sec helium maximum |
| Family valve leak-by context | Brooks-authored SLA7900 data-sheet context lists valve leak-by below 0.5% full scale |
Materials
| Family wetted-material context | Brooks-authored SLA7900 data-sheet context identifies 316L VAR stainless steel, 316L stainless steel, high-alloy ferritic stainless steel, nickel seals, and 17-7PH stainless steel valve-seat material for documented family configurations |
| Family wetted-surface context | Brooks-authored SLA7900 data-sheet context describes wetted surfaces as electropolished to 5 Ra for documented family configurations |
Connections
| Process connection family | Brooks SLA7900 documentation shows VCR and downport seal connection configurations for SLA7950S family variants; exact fitting package should be verified from the unit label and body |
Controls
| Analog I/O family context | Brooks-authored SLA7900 documentation identifies SLA7950S as an analog-I/O model using 9-pin or 15-pin male D-connector configurations |
| Analog signal context | Brooks-authored SLA7900 documentation lists 0-5 V setpoint and flow signals with a separate valve-override signal for analog configurations |
| RS-485 option context | Brooks-authored SLA7900 documentation lists a 15-pin D-connector RS-485 option using Brooks S-Protocol based on HART for applicable configurations |
Electrical
| Analog power context | Brooks-authored SLA7900 documentation lists 13.5 to 27 VDC power for analog I/O versions, with 15 VDC nominal |
| Analog or RS-485 power requirement with valve | Brooks-authored SLA7900 data-sheet context lists 4.2 W typical and 4.6 W maximum for analog I/O or RS-485 family variants with valve |
Environment
| Family operating ambient context | Brooks-authored SLA7900 data-sheet context lists operating ambient temperature from 0 C to 65 C and non-operating ambient temperature from -25 C to 100 C |
Cleanliness
| Family particulate context | Brooks-authored SLA7900 data-sheet context lists zero particles per cubic foot greater than 0.1 microns under process conditions and less than 4 particles per cubic foot greater than 0.02 microns under process conditions |
Functionality
| Calibration storage | Brooks-authored SLA7900 family context describes storage and pre-programming of up to 10 gas calibrations or ranges on a single device |
Documentation Downloads
Local PDF copiesPart Photos
0 imagesHistorical archive images for identification, labels, connectors, and condition reference, not current inventory.
Historical Listings & Prices
Historical listing data, not a current offerArchive records4Tracked historical listing records
Historical median price$251.78Based on archived listing records
Recorded price range$217.48 - $569.70Low to high recorded listing price
Local documents2PDF copies available from Sonisys
Recorded price context
The typical recorded price range is $217.80 to $484.29. Based on 4 archived listing records; not a current offer, appraisal, or confirmed sale price.
View archived listing titles
- BROOKS INSTRUMENTS SLA7950S1UGG1D2E1 SMART MASS FLOW CONTROLLR 10 SLPM AR
- BROOKS Delta Clase Smart Masa Flujo SLA7950S1UGG1D2E1 Gas N20 Fr 25 Slpm
- BROOKS DELTA CLASS SLA7950S1UGG1D2E1 1pcs
Archived listings
Other Part Numbers & Aliases
SLA7950S1UGG1D2E1Brooks SLA7950S1UGG1D2E1Brooks Instrument SLA7950S1UGG1D2E1